JPH0479420B2 - - Google Patents

Info

Publication number
JPH0479420B2
JPH0479420B2 JP58208408A JP20840883A JPH0479420B2 JP H0479420 B2 JPH0479420 B2 JP H0479420B2 JP 58208408 A JP58208408 A JP 58208408A JP 20840883 A JP20840883 A JP 20840883A JP H0479420 B2 JPH0479420 B2 JP H0479420B2
Authority
JP
Japan
Prior art keywords
sensor
beam member
semiconductor
support frame
crystal plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58208408A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5999356A (ja
Inventor
Ingemaa Hanson Yan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of JPS5999356A publication Critical patent/JPS5999356A/ja
Publication of JPH0479420B2 publication Critical patent/JPH0479420B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
JP58208408A 1982-11-09 1983-11-08 半導体加速度計 Granted JPS5999356A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/440,462 US4553436A (en) 1982-11-09 1982-11-09 Silicon accelerometer
US440462 1982-11-09

Publications (2)

Publication Number Publication Date
JPS5999356A JPS5999356A (ja) 1984-06-08
JPH0479420B2 true JPH0479420B2 (en, 2012) 1992-12-15

Family

ID=23748854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58208408A Granted JPS5999356A (ja) 1982-11-09 1983-11-08 半導体加速度計

Country Status (2)

Country Link
US (1) US4553436A (en, 2012)
JP (1) JPS5999356A (en, 2012)

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DE4309786B4 (de) * 1992-03-25 2005-07-07 Fuji Electric Co., Ltd., Kawasaki Halbleiterbeschleunigungssensor
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JP2831195B2 (ja) * 1992-03-25 1998-12-02 富士電機株式会社 半導体加速度センサ
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JP3281217B2 (ja) * 1995-05-23 2002-05-13 富士電機株式会社 半導体式加速度センサと該センサのセンサ素子の特性評価方法
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US9075078B2 (en) 2010-09-28 2015-07-07 Infineon Technologies Ag Microelectromechanical accelerometer with wireless transmission capabilities
US8991253B2 (en) * 2010-09-28 2015-03-31 Infineon Technologies Ag Microelectromechanical system
CN102642801B (zh) * 2012-04-27 2015-03-25 中国科学院上海微系统与信息技术研究所 双面平行对称硅梁质量块结构及其制备方法
WO2015042700A1 (en) 2013-09-24 2015-04-02 Motion Engine Inc. Mems components and method of wafer-level manufacturing thereof
EP3019442A4 (en) 2013-07-08 2017-01-25 Motion Engine Inc. Mems device and method of manufacturing
EP3028007A4 (en) 2013-08-02 2017-07-12 Motion Engine Inc. Mems motion sensor and method of manufacturing
JP6590812B2 (ja) 2014-01-09 2019-10-16 モーション・エンジン・インコーポレーテッド 集積ｍｅｍｓシステム
US20170030788A1 (en) 2014-04-10 2017-02-02 Motion Engine Inc. Mems pressure sensor
WO2015184531A1 (en) 2014-06-02 2015-12-10 Motion Engine Inc. Multi-mass mems motion sensor
EP3201586B1 (en) * 2014-10-02 2020-03-11 Mersen Benelux BV Pressure sensor containing mechanically deforming elements
CA3004760A1 (en) 2014-12-09 2016-06-16 Motion Engine Inc. 3d mems magnetometer and associated methods
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CN109596859B (zh) * 2019-01-18 2021-08-31 中国电子科技集团公司第十三研究所 压阻式加速度传感器
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Also Published As

Publication number Publication date
US4553436A (en) 1985-11-19
JPS5999356A (ja) 1984-06-08

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