GB2296977B - Semi-conductor acceleration sensor - Google Patents

Semi-conductor acceleration sensor

Info

Publication number
GB2296977B
GB2296977B GB9605377A GB9605377A GB2296977B GB 2296977 B GB2296977 B GB 2296977B GB 9605377 A GB9605377 A GB 9605377A GB 9605377 A GB9605377 A GB 9605377A GB 2296977 B GB2296977 B GB 2296977B
Authority
GB
United Kingdom
Prior art keywords
semi
acceleration sensor
conductor
conductor acceleration
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB9605377A
Other versions
GB2296977A (en
GB9605377D0 (en
Inventor
Katsumichi Ueyanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Ten Ltd
Fuji Electric Co Ltd
Original Assignee
Denso Ten Ltd
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4066470A external-priority patent/JP2831195B2/en
Priority claimed from JP04227651A external-priority patent/JP3115427B2/en
Application filed by Denso Ten Ltd, Fuji Electric Co Ltd filed Critical Denso Ten Ltd
Priority claimed from GB9306077A external-priority patent/GB2266151B/en
Publication of GB9605377D0 publication Critical patent/GB9605377D0/en
Publication of GB2296977A publication Critical patent/GB2296977A/en
Application granted granted Critical
Publication of GB2296977B publication Critical patent/GB2296977B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/006—Details of instruments used for thermal compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
GB9605377A 1992-03-25 1993-03-24 Semi-conductor acceleration sensor Expired - Lifetime GB2296977B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP4066470A JP2831195B2 (en) 1992-03-25 1992-03-25 Semiconductor acceleration sensor
JP04227651A JP3115427B2 (en) 1991-11-28 1992-08-27 Semiconductor acceleration sensor
GB9306077A GB2266151B (en) 1992-03-25 1993-03-24 Semiconductor acceleration sensor

Publications (3)

Publication Number Publication Date
GB9605377D0 GB9605377D0 (en) 1996-05-15
GB2296977A GB2296977A (en) 1996-07-17
GB2296977B true GB2296977B (en) 1996-09-11

Family

ID=27266632

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9605377A Expired - Lifetime GB2296977B (en) 1992-03-25 1993-03-24 Semi-conductor acceleration sensor

Country Status (1)

Country Link
GB (1) GB2296977B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109596859A (en) * 2019-01-18 2019-04-09 中国电子科技集团公司第十三研究所 Piezoresistance type acceleration sensor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO315915B1 (en) 2002-02-25 2003-11-10 Sintef Elektronikk Og Kybernet Fj¶rvekt

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4553436A (en) * 1982-11-09 1985-11-19 Texas Instruments Incorporated Silicon accelerometer
US4641539A (en) * 1984-08-08 1987-02-10 Texas Instruments Incorporated Sensor responding to the action of a force

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4553436A (en) * 1982-11-09 1985-11-19 Texas Instruments Incorporated Silicon accelerometer
US4641539A (en) * 1984-08-08 1987-02-10 Texas Instruments Incorporated Sensor responding to the action of a force

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109596859A (en) * 2019-01-18 2019-04-09 中国电子科技集团公司第十三研究所 Piezoresistance type acceleration sensor
CN109596859B (en) * 2019-01-18 2021-08-31 中国电子科技集团公司第十三研究所 Piezoresistive acceleration sensor

Also Published As

Publication number Publication date
GB2296977A (en) 1996-07-17
GB9605377D0 (en) 1996-05-15

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Legal Events

Date Code Title Description
746 Register noted 'licences of right' (sect. 46/1977)

Effective date: 20040625

732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20100408 AND 20100414

732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20110908 AND 20110914

PE20 Patent expired after termination of 20 years

Expiry date: 20130323