JPH047446B2 - - Google Patents
Info
- Publication number
- JPH047446B2 JPH047446B2 JP58163494A JP16349483A JPH047446B2 JP H047446 B2 JPH047446 B2 JP H047446B2 JP 58163494 A JP58163494 A JP 58163494A JP 16349483 A JP16349483 A JP 16349483A JP H047446 B2 JPH047446 B2 JP H047446B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- wavefront
- measurement
- shape
- plane mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 43
- 230000003287 optical effect Effects 0.000 claims description 26
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 238000000691 measurement method Methods 0.000 claims description 5
- 238000003384 imaging method Methods 0.000 description 17
- 238000010586 diagram Methods 0.000 description 4
- 230000004907 flux Effects 0.000 description 3
- 238000005286 illumination Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58163494A JPS6055213A (ja) | 1983-09-06 | 1983-09-06 | 波面形状測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58163494A JPS6055213A (ja) | 1983-09-06 | 1983-09-06 | 波面形状測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6055213A JPS6055213A (ja) | 1985-03-30 |
JPH047446B2 true JPH047446B2 (ru) | 1992-02-12 |
Family
ID=15774928
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58163494A Granted JPS6055213A (ja) | 1983-09-06 | 1983-09-06 | 波面形状測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6055213A (ru) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0613443Y2 (ja) * | 1985-04-22 | 1994-04-06 | 株式会社リコー | 波面形状測定器 |
US4743118A (en) * | 1985-04-04 | 1988-05-10 | Ricoh Company, Ltd. | Method of detecting origin of shear and measuring amount of shear in shearing interferometer systems |
JPH02238306A (ja) * | 1989-03-13 | 1990-09-20 | Ricoh Co Ltd | 微小変位測定装置 |
WO2015052715A1 (en) * | 2013-10-07 | 2015-04-16 | Ramot At Tel-Aviv University Ltd. | Polarization-independent differential interference contrast optical arrangement |
-
1983
- 1983-09-06 JP JP58163494A patent/JPS6055213A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6055213A (ja) | 1985-03-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2752003B2 (ja) | 走査機能を備えた検査干渉計 | |
KR100225923B1 (ko) | 이상 회절 간섭계 | |
JP2000501508A (ja) | 半導体ウエファの厚さ誤差測定用干渉計 | |
TWI408356B (zh) | 反射式散射儀 | |
JPH0324432A (ja) | 光学系、特に眼鏡用レンズの位相検出検査用光学装置 | |
JP2010121960A (ja) | 測定装置及び被検物の測定方法 | |
CN105758381A (zh) | 一种基于频谱分析的摄像头模组倾斜探测方法 | |
JP2003302205A (ja) | シアリング干渉測定方法及びシアリング干渉計、投影光学系の製造方法、投影光学系、及び投影露光装置 | |
JPH047446B2 (ru) | ||
JP2001235317A (ja) | 光学球面曲率半径測定装置 | |
JPH0611323A (ja) | 形状測定装置 | |
JPS6024401B2 (ja) | 被測定物の物理定数を測定する方法 | |
JPH047447B2 (ru) | ||
JP2000097657A (ja) | 干渉計 | |
JPS6365882B2 (ru) | ||
JP2003106934A (ja) | 光路長測定装置及び方法、厚さ測定装置及び方法、屈折率分布傾斜成分測定装置及び方法 | |
JPS60211306A (ja) | 縞走査シエアリング干渉測定装置における光学系調整方法 | |
JP3410800B2 (ja) | 耐振動型干渉計 | |
JPH0828319B2 (ja) | 投影露光装置 | |
JPH1047938A (ja) | レーザビーム拡がり角測定装置 | |
JPH11325848A (ja) | 非球面形状測定装置 | |
KR101464695B1 (ko) | 멀티 간섭 위상 동시 측정기능을 갖는 간섭계 | |
JP2023125296A (ja) | 分光エリプソメータ | |
JPH05157532A (ja) | 測定用計算機ホログラム及びそれを用いた計測方法 | |
JPH0593611A (ja) | 厚さ測定装置 |