JPH0467774B2 - - Google Patents
Info
- Publication number
- JPH0467774B2 JPH0467774B2 JP60097404A JP9740485A JPH0467774B2 JP H0467774 B2 JPH0467774 B2 JP H0467774B2 JP 60097404 A JP60097404 A JP 60097404A JP 9740485 A JP9740485 A JP 9740485A JP H0467774 B2 JPH0467774 B2 JP H0467774B2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- duct
- filament
- ionized
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9740485A JPS61256622A (ja) | 1985-05-08 | 1985-05-08 | 薄膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9740485A JPS61256622A (ja) | 1985-05-08 | 1985-05-08 | 薄膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61256622A JPS61256622A (ja) | 1986-11-14 |
| JPH0467774B2 true JPH0467774B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-10-29 |
Family
ID=14191567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9740485A Granted JPS61256622A (ja) | 1985-05-08 | 1985-05-08 | 薄膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61256622A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2619068B2 (ja) * | 1989-09-08 | 1997-06-11 | 三菱電機株式会社 | 薄膜形成装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4913793U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1972-05-11 | 1974-02-05 | ||
| JPS552901A (en) * | 1978-06-19 | 1980-01-10 | American District Telegraph Co | Optical smoke detector |
| JPS5754930A (en) * | 1980-09-20 | 1982-04-01 | Minolta Camera Co Ltd | Exposure controlling circuit of camera |
| JPS58118119A (ja) * | 1982-01-07 | 1983-07-14 | Nec Corp | 反応性イオンプレ−テイング装置 |
-
1985
- 1985-05-08 JP JP9740485A patent/JPS61256622A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61256622A (ja) | 1986-11-14 |