JPH0516214Y2 - - Google Patents
Info
- Publication number
- JPH0516214Y2 JPH0516214Y2 JP18184186U JP18184186U JPH0516214Y2 JP H0516214 Y2 JPH0516214 Y2 JP H0516214Y2 JP 18184186 U JP18184186 U JP 18184186U JP 18184186 U JP18184186 U JP 18184186U JP H0516214 Y2 JPH0516214 Y2 JP H0516214Y2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- thin film
- lid
- partition wall
- high vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 13
- 238000005192 partition Methods 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 9
- 150000002500 ions Chemical class 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 15
- 230000007935 neutral effect Effects 0.000 description 7
- 238000000605 extraction Methods 0.000 description 4
- 239000012212 insulator Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18184186U JPH0516214Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-11-28 | 1986-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18184186U JPH0516214Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-11-28 | 1986-11-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6389964U JPS6389964U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-06-10 |
| JPH0516214Y2 true JPH0516214Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-04-28 |
Family
ID=31127084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18184186U Expired - Lifetime JPH0516214Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-11-28 | 1986-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0516214Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1986
- 1986-11-28 JP JP18184186U patent/JPH0516214Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6389964U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-06-10 |