JPH0343228Y2 - - Google Patents
Info
- Publication number
- JPH0343228Y2 JPH0343228Y2 JP7117486U JP7117486U JPH0343228Y2 JP H0343228 Y2 JPH0343228 Y2 JP H0343228Y2 JP 7117486 U JP7117486 U JP 7117486U JP 7117486 U JP7117486 U JP 7117486U JP H0343228 Y2 JPH0343228 Y2 JP H0343228Y2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- shield plate
- electric field
- heat shield
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005684 electric field Effects 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 15
- 239000010409 thin film Substances 0.000 claims description 15
- 230000007935 neutral effect Effects 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 description 8
- 238000007740 vapor deposition Methods 0.000 description 7
- 239000012212 insulator Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000000116 mitigating effect Effects 0.000 description 2
- 230000002040 relaxant effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7117486U JPH0343228Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-05-14 | 1986-05-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7117486U JPH0343228Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-05-14 | 1986-05-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62182969U JPS62182969U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-20 |
| JPH0343228Y2 true JPH0343228Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-09-10 |
Family
ID=30913489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7117486U Expired JPH0343228Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-05-14 | 1986-05-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0343228Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1986
- 1986-05-14 JP JP7117486U patent/JPH0343228Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62182969U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-20 |