JPH0467772B2 - - Google Patents
Info
- Publication number
- JPH0467772B2 JPH0467772B2 JP60215002A JP21500285A JPH0467772B2 JP H0467772 B2 JPH0467772 B2 JP H0467772B2 JP 60215002 A JP60215002 A JP 60215002A JP 21500285 A JP21500285 A JP 21500285A JP H0467772 B2 JPH0467772 B2 JP H0467772B2
- Authority
- JP
- Japan
- Prior art keywords
- alignment
- pattern
- wafer
- position detection
- detection error
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 104
- 238000005286 illumination Methods 0.000 claims description 64
- 238000000034 method Methods 0.000 claims description 21
- 230000003287 optical effect Effects 0.000 claims description 11
- 238000012937 correction Methods 0.000 claims description 5
- 230000003595 spectral effect Effects 0.000 claims description 4
- 238000001228 spectrum Methods 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims 4
- 230000002093 peripheral effect Effects 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 description 45
- 229920002120 photoresistant polymer Polymers 0.000 description 21
- 239000011248 coating agent Substances 0.000 description 11
- 238000000576 coating method Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60215002A JPS6276622A (ja) | 1985-09-30 | 1985-09-30 | 縮小投影式アライメント方法及びその装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60215002A JPS6276622A (ja) | 1985-09-30 | 1985-09-30 | 縮小投影式アライメント方法及びその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6276622A JPS6276622A (ja) | 1987-04-08 |
| JPH0467772B2 true JPH0467772B2 (enrdf_load_stackoverflow) | 1992-10-29 |
Family
ID=16665076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60215002A Granted JPS6276622A (ja) | 1985-09-30 | 1985-09-30 | 縮小投影式アライメント方法及びその装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6276622A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2683075B2 (ja) * | 1988-12-23 | 1997-11-26 | キヤノン株式会社 | 半導体製造装置及び方法 |
| US7728953B2 (en) | 2004-03-01 | 2010-06-01 | Nikon Corporation | Exposure method, exposure system, and substrate processing apparatus |
| JP4760705B2 (ja) * | 2004-03-01 | 2011-08-31 | 株式会社ニコン | 事前計測処理方法、露光システム及び基板処理装置 |
-
1985
- 1985-09-30 JP JP60215002A patent/JPS6276622A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6276622A (ja) | 1987-04-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |