JPH045322B2 - - Google Patents

Info

Publication number
JPH045322B2
JPH045322B2 JP27871484A JP27871484A JPH045322B2 JP H045322 B2 JPH045322 B2 JP H045322B2 JP 27871484 A JP27871484 A JP 27871484A JP 27871484 A JP27871484 A JP 27871484A JP H045322 B2 JPH045322 B2 JP H045322B2
Authority
JP
Japan
Prior art keywords
movable body
measured
stylus
measurement
end point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP27871484A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61155901A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP27871484A priority Critical patent/JPS61155901A/ja
Publication of JPS61155901A publication Critical patent/JPS61155901A/ja
Publication of JPH045322B2 publication Critical patent/JPH045322B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP27871484A 1984-12-28 1984-12-28 触針式測定機 Granted JPS61155901A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27871484A JPS61155901A (ja) 1984-12-28 1984-12-28 触針式測定機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27871484A JPS61155901A (ja) 1984-12-28 1984-12-28 触針式測定機

Publications (2)

Publication Number Publication Date
JPS61155901A JPS61155901A (ja) 1986-07-15
JPH045322B2 true JPH045322B2 (en, 2012) 1992-01-31

Family

ID=17601165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27871484A Granted JPS61155901A (ja) 1984-12-28 1984-12-28 触針式測定機

Country Status (1)

Country Link
JP (1) JPS61155901A (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6397667B1 (en) 1997-12-26 2002-06-04 Mitutoyo Corporation Surface property measuring device
JP6093506B2 (ja) * 2012-03-19 2017-03-08 株式会社ミツトヨ 表面性状測定機および表面性状測定方法
CN109099824B (zh) * 2018-07-25 2020-09-29 温州鸿伟新能源有限公司 一种木板抛光后平整度检测器

Also Published As

Publication number Publication date
JPS61155901A (ja) 1986-07-15

Similar Documents

Publication Publication Date Title
US5895084A (en) Cam operated microgripper
EP1857775A1 (en) Method and device for controlling a measurement of a contour measuring instrument
JP2004354289A (ja) 測定ヘッド
JP2886452B2 (ja) 変形量検出手段付き直線運動装置
JPH045322B2 (en, 2012)
JP7614523B2 (ja) 形状測定装置
JPH1013117A (ja) アンテナ摺動試験装置
JPH1177473A (ja) 送り装置
JPH01177938A (ja) 精密位置決め装置
JP2003202359A (ja) 接触子の接触圧力制御装置
JPS61155701A (ja) 自動送り型測定機
JP4073060B2 (ja) 圧電素子の急速変形に伴う衝撃力を利用した小型精密位置決め装置
JPS59115140A (ja) 精密位置決めテ−ブル
JP2556550Y2 (ja) 表面形状測定機
CN112229616B (zh) 执行器测试系统及机构
JP2002046055A (ja) 研磨装置
JPS6225203B2 (en, 2012)
JP4034179B2 (ja) ステージおよびそれを用いた電子顕微鏡装置
JPS61219820A (ja) デジタル表示型測定器
JP2004284000A (ja) 真直度制御ステージ
JPH0236086Y2 (en, 2012)
JPS5842934Y2 (ja) スポット切換機構
JPH0332413B2 (en, 2012)
KR20010087108A (ko) 측정 탐침 구동장치
JPH06102037A (ja) 形状測定装置