JPH045322B2 - - Google Patents
Info
- Publication number
- JPH045322B2 JPH045322B2 JP27871484A JP27871484A JPH045322B2 JP H045322 B2 JPH045322 B2 JP H045322B2 JP 27871484 A JP27871484 A JP 27871484A JP 27871484 A JP27871484 A JP 27871484A JP H045322 B2 JPH045322 B2 JP H045322B2
- Authority
- JP
- Japan
- Prior art keywords
- movable body
- measured
- stylus
- measurement
- end point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 33
- 238000001514 detection method Methods 0.000 claims description 20
- 230000007246 mechanism Effects 0.000 claims description 19
- 241001422033 Thestylus Species 0.000 claims description 12
- 230000003746 surface roughness Effects 0.000 description 24
- 230000008859 change Effects 0.000 description 11
- 238000004439 roughness measurement Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27871484A JPS61155901A (ja) | 1984-12-28 | 1984-12-28 | 触針式測定機 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27871484A JPS61155901A (ja) | 1984-12-28 | 1984-12-28 | 触針式測定機 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61155901A JPS61155901A (ja) | 1986-07-15 |
JPH045322B2 true JPH045322B2 (en, 2012) | 1992-01-31 |
Family
ID=17601165
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP27871484A Granted JPS61155901A (ja) | 1984-12-28 | 1984-12-28 | 触針式測定機 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61155901A (en, 2012) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6397667B1 (en) | 1997-12-26 | 2002-06-04 | Mitutoyo Corporation | Surface property measuring device |
JP6093506B2 (ja) * | 2012-03-19 | 2017-03-08 | 株式会社ミツトヨ | 表面性状測定機および表面性状測定方法 |
CN109099824B (zh) * | 2018-07-25 | 2020-09-29 | 温州鸿伟新能源有限公司 | 一种木板抛光后平整度检测器 |
-
1984
- 1984-12-28 JP JP27871484A patent/JPS61155901A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61155901A (ja) | 1986-07-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5895084A (en) | Cam operated microgripper | |
EP1857775A1 (en) | Method and device for controlling a measurement of a contour measuring instrument | |
JP2004354289A (ja) | 測定ヘッド | |
JP2886452B2 (ja) | 変形量検出手段付き直線運動装置 | |
JPH045322B2 (en, 2012) | ||
JP7614523B2 (ja) | 形状測定装置 | |
JPH1013117A (ja) | アンテナ摺動試験装置 | |
JPH1177473A (ja) | 送り装置 | |
JPH01177938A (ja) | 精密位置決め装置 | |
JP2003202359A (ja) | 接触子の接触圧力制御装置 | |
JPS61155701A (ja) | 自動送り型測定機 | |
JP4073060B2 (ja) | 圧電素子の急速変形に伴う衝撃力を利用した小型精密位置決め装置 | |
JPS59115140A (ja) | 精密位置決めテ−ブル | |
JP2556550Y2 (ja) | 表面形状測定機 | |
CN112229616B (zh) | 执行器测试系统及机构 | |
JP2002046055A (ja) | 研磨装置 | |
JPS6225203B2 (en, 2012) | ||
JP4034179B2 (ja) | ステージおよびそれを用いた電子顕微鏡装置 | |
JPS61219820A (ja) | デジタル表示型測定器 | |
JP2004284000A (ja) | 真直度制御ステージ | |
JPH0236086Y2 (en, 2012) | ||
JPS5842934Y2 (ja) | スポット切換機構 | |
JPH0332413B2 (en, 2012) | ||
KR20010087108A (ko) | 측정 탐침 구동장치 | |
JPH06102037A (ja) | 形状測定装置 |