JPH0451967B2 - - Google Patents
Info
- Publication number
- JPH0451967B2 JPH0451967B2 JP62123863A JP12386387A JPH0451967B2 JP H0451967 B2 JPH0451967 B2 JP H0451967B2 JP 62123863 A JP62123863 A JP 62123863A JP 12386387 A JP12386387 A JP 12386387A JP H0451967 B2 JPH0451967 B2 JP H0451967B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- area
- substrate
- alignment marks
- alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 38
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000001444 catalytic combustion detection Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62123863A JPS6312133A (ja) | 1987-05-22 | 1987-05-22 | パタ−ン形成基板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62123863A JPS6312133A (ja) | 1987-05-22 | 1987-05-22 | パタ−ン形成基板 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59035330A Division JPS60180119A (ja) | 1984-02-28 | 1984-02-28 | アライメントマ−ク作成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6312133A JPS6312133A (ja) | 1988-01-19 |
| JPH0451967B2 true JPH0451967B2 (enrdf_load_stackoverflow) | 1992-08-20 |
Family
ID=14871247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62123863A Granted JPS6312133A (ja) | 1987-05-22 | 1987-05-22 | パタ−ン形成基板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6312133A (enrdf_load_stackoverflow) |
-
1987
- 1987-05-22 JP JP62123863A patent/JPS6312133A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6312133A (ja) | 1988-01-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |