JPH0449885B2 - - Google Patents

Info

Publication number
JPH0449885B2
JPH0449885B2 JP61089249A JP8924986A JPH0449885B2 JP H0449885 B2 JPH0449885 B2 JP H0449885B2 JP 61089249 A JP61089249 A JP 61089249A JP 8924986 A JP8924986 A JP 8924986A JP H0449885 B2 JPH0449885 B2 JP H0449885B2
Authority
JP
Japan
Prior art keywords
output
light receiving
receiving element
scanning beam
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61089249A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62245907A (ja
Inventor
Yoshiharu Kuwabara
Sadamitsu Nishihara
Masaki Tomitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP8924986A priority Critical patent/JPS62245907A/ja
Publication of JPS62245907A publication Critical patent/JPS62245907A/ja
Publication of JPH0449885B2 publication Critical patent/JPH0449885B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP8924986A 1986-04-18 1986-04-18 光学式測定装置 Granted JPS62245907A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8924986A JPS62245907A (ja) 1986-04-18 1986-04-18 光学式測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8924986A JPS62245907A (ja) 1986-04-18 1986-04-18 光学式測定装置

Publications (2)

Publication Number Publication Date
JPS62245907A JPS62245907A (ja) 1987-10-27
JPH0449885B2 true JPH0449885B2 (en:Method) 1992-08-12

Family

ID=13965483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8924986A Granted JPS62245907A (ja) 1986-04-18 1986-04-18 光学式測定装置

Country Status (1)

Country Link
JP (1) JPS62245907A (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0552707U (ja) * 1991-12-16 1993-07-13 株式会社ミツトヨ 光学式寸法測定装置
JP2920182B2 (ja) * 1992-11-20 1999-07-19 五洋建設株式会社 海底深度測定装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52153468A (en) * 1976-06-15 1977-12-20 Fujitsu Ltd Thickness measuring method of substrates

Also Published As

Publication number Publication date
JPS62245907A (ja) 1987-10-27

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