JPH0447646Y2 - - Google Patents
Info
- Publication number
- JPH0447646Y2 JPH0447646Y2 JP11944587U JP11944587U JPH0447646Y2 JP H0447646 Y2 JPH0447646 Y2 JP H0447646Y2 JP 11944587 U JP11944587 U JP 11944587U JP 11944587 U JP11944587 U JP 11944587U JP H0447646 Y2 JPH0447646 Y2 JP H0447646Y2
- Authority
- JP
- Japan
- Prior art keywords
- inspection unit
- workpiece
- unit
- water tank
- inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007689 inspection Methods 0.000 claims description 89
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 36
- 230000007246 mechanism Effects 0.000 claims description 24
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 6
- 210000000078 claw Anatomy 0.000 claims description 4
- 230000003028 elevating effect Effects 0.000 description 11
- 238000000034 method Methods 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
- Testing Of Engines (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11944587U JPH0447646Y2 (enrdf_load_stackoverflow) | 1987-08-03 | 1987-08-03 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11944587U JPH0447646Y2 (enrdf_load_stackoverflow) | 1987-08-03 | 1987-08-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6423641U JPS6423641U (enrdf_load_stackoverflow) | 1989-02-08 |
JPH0447646Y2 true JPH0447646Y2 (enrdf_load_stackoverflow) | 1992-11-10 |
Family
ID=31364681
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11944587U Expired JPH0447646Y2 (enrdf_load_stackoverflow) | 1987-08-03 | 1987-08-03 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0447646Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-08-03 JP JP11944587U patent/JPH0447646Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6423641U (enrdf_load_stackoverflow) | 1989-02-08 |
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