JPH0447644Y2 - - Google Patents

Info

Publication number
JPH0447644Y2
JPH0447644Y2 JP1987060542U JP6054287U JPH0447644Y2 JP H0447644 Y2 JPH0447644 Y2 JP H0447644Y2 JP 1987060542 U JP1987060542 U JP 1987060542U JP 6054287 U JP6054287 U JP 6054287U JP H0447644 Y2 JPH0447644 Y2 JP H0447644Y2
Authority
JP
Japan
Prior art keywords
gas
pressure vessel
tray
partition wall
bottom plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987060542U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63167234U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987060542U priority Critical patent/JPH0447644Y2/ja
Publication of JPS63167234U publication Critical patent/JPS63167234U/ja
Application granted granted Critical
Publication of JPH0447644Y2 publication Critical patent/JPH0447644Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Examining Or Testing Airtightness (AREA)
JP1987060542U 1987-04-21 1987-04-21 Expired JPH0447644Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987060542U JPH0447644Y2 (enExample) 1987-04-21 1987-04-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987060542U JPH0447644Y2 (enExample) 1987-04-21 1987-04-21

Publications (2)

Publication Number Publication Date
JPS63167234U JPS63167234U (enExample) 1988-10-31
JPH0447644Y2 true JPH0447644Y2 (enExample) 1992-11-10

Family

ID=30893043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987060542U Expired JPH0447644Y2 (enExample) 1987-04-21 1987-04-21

Country Status (1)

Country Link
JP (1) JPH0447644Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1019718A (ja) * 1996-07-04 1998-01-23 Ulvac Japan Ltd 漏洩試験用真空容器

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502988A (enExample) * 1973-05-08 1975-01-13
JPS58108756A (ja) * 1981-12-22 1983-06-28 Toshiba Corp 気密封止パッケ−ジ
JPS60158332A (ja) * 1984-01-30 1985-08-19 Mitsubishi Electric Corp 密封タンクの漏れ試験方法

Also Published As

Publication number Publication date
JPS63167234U (enExample) 1988-10-31

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