JPH0447456B2 - - Google Patents
Info
- Publication number
- JPH0447456B2 JPH0447456B2 JP27874488A JP27874488A JPH0447456B2 JP H0447456 B2 JPH0447456 B2 JP H0447456B2 JP 27874488 A JP27874488 A JP 27874488A JP 27874488 A JP27874488 A JP 27874488A JP H0447456 B2 JPH0447456 B2 JP H0447456B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- oxygen
- heat treatment
- defects
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 35
- 239000001301 oxygen Substances 0.000 claims description 35
- 229910052760 oxygen Inorganic materials 0.000 claims description 35
- 238000010438 heat treatment Methods 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 15
- 239000013078 crystal Substances 0.000 claims description 10
- 239000010408 film Substances 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 2
- 238000010574 gas phase reaction Methods 0.000 claims 1
- 230000007547 defect Effects 0.000 description 18
- 230000000694 effects Effects 0.000 description 8
- 238000011282 treatment Methods 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 238000005530 etching Methods 0.000 description 3
- 229910001385 heavy metal Inorganic materials 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 238000005247 gettering Methods 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 238000004566 IR spectroscopy Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27874488A JPH02177321A (ja) | 1988-11-04 | 1988-11-04 | 半導体基板の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27874488A JPH02177321A (ja) | 1988-11-04 | 1988-11-04 | 半導体基板の製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14418379A Division JPS5667922A (en) | 1979-11-07 | 1979-11-07 | Preparation method of semiconductor system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02177321A JPH02177321A (ja) | 1990-07-10 |
| JPH0447456B2 true JPH0447456B2 (enrdf_load_stackoverflow) | 1992-08-04 |
Family
ID=17601598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27874488A Granted JPH02177321A (ja) | 1988-11-04 | 1988-11-04 | 半導体基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02177321A (enrdf_load_stackoverflow) |
-
1988
- 1988-11-04 JP JP27874488A patent/JPH02177321A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02177321A (ja) | 1990-07-10 |
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