JPH0444922B2 - - Google Patents

Info

Publication number
JPH0444922B2
JPH0444922B2 JP59072380A JP7238084A JPH0444922B2 JP H0444922 B2 JPH0444922 B2 JP H0444922B2 JP 59072380 A JP59072380 A JP 59072380A JP 7238084 A JP7238084 A JP 7238084A JP H0444922 B2 JPH0444922 B2 JP H0444922B2
Authority
JP
Japan
Prior art keywords
light
beam splitter
polarizing beam
target
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59072380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60216207A (ja
Inventor
Toshitsugu Ueda
Eiji Ogita
Yoshinobu Sugihara
Daisuke Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP59072380A priority Critical patent/JPS60216207A/ja
Publication of JPS60216207A publication Critical patent/JPS60216207A/ja
Publication of JPH0444922B2 publication Critical patent/JPH0444922B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP59072380A 1984-04-11 1984-04-11 光学式機械量測定装置 Granted JPS60216207A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59072380A JPS60216207A (ja) 1984-04-11 1984-04-11 光学式機械量測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59072380A JPS60216207A (ja) 1984-04-11 1984-04-11 光学式機械量測定装置

Publications (2)

Publication Number Publication Date
JPS60216207A JPS60216207A (ja) 1985-10-29
JPH0444922B2 true JPH0444922B2 (enrdf_load_stackoverflow) 1992-07-23

Family

ID=13487626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59072380A Granted JPS60216207A (ja) 1984-04-11 1984-04-11 光学式機械量測定装置

Country Status (1)

Country Link
JP (1) JPS60216207A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS60216207A (ja) 1985-10-29

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