JPS60216207A - 光学式機械量測定装置 - Google Patents

光学式機械量測定装置

Info

Publication number
JPS60216207A
JPS60216207A JP59072380A JP7238084A JPS60216207A JP S60216207 A JPS60216207 A JP S60216207A JP 59072380 A JP59072380 A JP 59072380A JP 7238084 A JP7238084 A JP 7238084A JP S60216207 A JPS60216207 A JP S60216207A
Authority
JP
Japan
Prior art keywords
light
pinhole
passing
dimensional
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59072380A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0444922B2 (enrdf_load_stackoverflow
Inventor
Toshitsugu Ueda
敏嗣 植田
Eiji Ogita
英治 荻田
Yoshinobu Sugihara
吉信 杉原
Daisuke Yamazaki
大輔 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP59072380A priority Critical patent/JPS60216207A/ja
Publication of JPS60216207A publication Critical patent/JPS60216207A/ja
Publication of JPH0444922B2 publication Critical patent/JPH0444922B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP59072380A 1984-04-11 1984-04-11 光学式機械量測定装置 Granted JPS60216207A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59072380A JPS60216207A (ja) 1984-04-11 1984-04-11 光学式機械量測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59072380A JPS60216207A (ja) 1984-04-11 1984-04-11 光学式機械量測定装置

Publications (2)

Publication Number Publication Date
JPS60216207A true JPS60216207A (ja) 1985-10-29
JPH0444922B2 JPH0444922B2 (enrdf_load_stackoverflow) 1992-07-23

Family

ID=13487626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59072380A Granted JPS60216207A (ja) 1984-04-11 1984-04-11 光学式機械量測定装置

Country Status (1)

Country Link
JP (1) JPS60216207A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0444922B2 (enrdf_load_stackoverflow) 1992-07-23

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