JPH026002B2 - - Google Patents

Info

Publication number
JPH026002B2
JPH026002B2 JP57109349A JP10934982A JPH026002B2 JP H026002 B2 JPH026002 B2 JP H026002B2 JP 57109349 A JP57109349 A JP 57109349A JP 10934982 A JP10934982 A JP 10934982A JP H026002 B2 JPH026002 B2 JP H026002B2
Authority
JP
Japan
Prior art keywords
light
polarizing beam
beam splitter
target
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57109349A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58225304A (ja
Inventor
Eiji Ogita
Toshitsugu Ueda
Yutaka Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP57109349A priority Critical patent/JPS58225304A/ja
Publication of JPS58225304A publication Critical patent/JPS58225304A/ja
Publication of JPH026002B2 publication Critical patent/JPH026002B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP57109349A 1982-06-25 1982-06-25 光学式機械量測定装置 Granted JPS58225304A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57109349A JPS58225304A (ja) 1982-06-25 1982-06-25 光学式機械量測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57109349A JPS58225304A (ja) 1982-06-25 1982-06-25 光学式機械量測定装置

Publications (2)

Publication Number Publication Date
JPS58225304A JPS58225304A (ja) 1983-12-27
JPH026002B2 true JPH026002B2 (enrdf_load_stackoverflow) 1990-02-07

Family

ID=14507969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57109349A Granted JPS58225304A (ja) 1982-06-25 1982-06-25 光学式機械量測定装置

Country Status (1)

Country Link
JP (1) JPS58225304A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8613635D0 (en) * 1986-06-05 1986-07-09 Tyrer J R Optical inspection
JPH03128405A (ja) * 1989-10-12 1991-05-31 Keyence Corp フォーミングマシン等における材料の送り量検出装置
IE910326A1 (en) * 1991-01-31 1992-07-29 Mairead Rosario Reynolds A method and apparatus for detecting direction and¹displacement of a surface
JP2008096295A (ja) * 2006-10-12 2008-04-24 Mitsutoyo Corp 三次元センサおよび接触プローブ

Also Published As

Publication number Publication date
JPS58225304A (ja) 1983-12-27

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