JPH0141205B2 - - Google Patents

Info

Publication number
JPH0141205B2
JPH0141205B2 JP57109348A JP10934882A JPH0141205B2 JP H0141205 B2 JPH0141205 B2 JP H0141205B2 JP 57109348 A JP57109348 A JP 57109348A JP 10934882 A JP10934882 A JP 10934882A JP H0141205 B2 JPH0141205 B2 JP H0141205B2
Authority
JP
Japan
Prior art keywords
light
target
axis
beam splitter
pbs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57109348A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58225303A (ja
Inventor
Toshitsugu Ueda
Eiji Ogita
Yutaka Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP57109348A priority Critical patent/JPS58225303A/ja
Publication of JPS58225303A publication Critical patent/JPS58225303A/ja
Publication of JPH0141205B2 publication Critical patent/JPH0141205B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP57109348A 1982-06-25 1982-06-25 光学式機械量測定装置 Granted JPS58225303A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57109348A JPS58225303A (ja) 1982-06-25 1982-06-25 光学式機械量測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57109348A JPS58225303A (ja) 1982-06-25 1982-06-25 光学式機械量測定装置

Publications (2)

Publication Number Publication Date
JPS58225303A JPS58225303A (ja) 1983-12-27
JPH0141205B2 true JPH0141205B2 (enrdf_load_stackoverflow) 1989-09-04

Family

ID=14507943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57109348A Granted JPS58225303A (ja) 1982-06-25 1982-06-25 光学式機械量測定装置

Country Status (1)

Country Link
JP (1) JPS58225303A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01320411A (ja) * 1988-06-22 1989-12-26 Hamamatsu Photonics Kk 変形の測定方法

Also Published As

Publication number Publication date
JPS58225303A (ja) 1983-12-27

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