JPS58225304A - 光学式機械量測定装置 - Google Patents

光学式機械量測定装置

Info

Publication number
JPS58225304A
JPS58225304A JP57109349A JP10934982A JPS58225304A JP S58225304 A JPS58225304 A JP S58225304A JP 57109349 A JP57109349 A JP 57109349A JP 10934982 A JP10934982 A JP 10934982A JP S58225304 A JPS58225304 A JP S58225304A
Authority
JP
Japan
Prior art keywords
light
pattern
movement
detecting
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57109349A
Other languages
English (en)
Japanese (ja)
Other versions
JPH026002B2 (enrdf_load_stackoverflow
Inventor
Eiji Ogita
英治 荻田
Toshitsugu Ueda
敏嗣 植田
Yutaka Ono
裕 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp, Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Electric Corp
Priority to JP57109349A priority Critical patent/JPS58225304A/ja
Publication of JPS58225304A publication Critical patent/JPS58225304A/ja
Publication of JPH026002B2 publication Critical patent/JPH026002B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP57109349A 1982-06-25 1982-06-25 光学式機械量測定装置 Granted JPS58225304A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57109349A JPS58225304A (ja) 1982-06-25 1982-06-25 光学式機械量測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57109349A JPS58225304A (ja) 1982-06-25 1982-06-25 光学式機械量測定装置

Publications (2)

Publication Number Publication Date
JPS58225304A true JPS58225304A (ja) 1983-12-27
JPH026002B2 JPH026002B2 (enrdf_load_stackoverflow) 1990-02-07

Family

ID=14507969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57109349A Granted JPS58225304A (ja) 1982-06-25 1982-06-25 光学式機械量測定装置

Country Status (1)

Country Link
JP (1) JPS58225304A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62298707A (ja) * 1986-06-05 1987-12-25 ブリティッシュ・テクノロジー・グループ・リミテッド 光学検査方法
JPH03128405A (ja) * 1989-10-12 1991-05-31 Keyence Corp フォーミングマシン等における材料の送り量検出装置
WO1992014115A1 (en) * 1991-01-31 1992-08-20 Vincent Toal A method and apparatus for determining direction of displacement of an object surface
JP2008096295A (ja) * 2006-10-12 2008-04-24 Mitsutoyo Corp 三次元センサおよび接触プローブ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62298707A (ja) * 1986-06-05 1987-12-25 ブリティッシュ・テクノロジー・グループ・リミテッド 光学検査方法
JPH03128405A (ja) * 1989-10-12 1991-05-31 Keyence Corp フォーミングマシン等における材料の送り量検出装置
WO1992014115A1 (en) * 1991-01-31 1992-08-20 Vincent Toal A method and apparatus for determining direction of displacement of an object surface
JP2008096295A (ja) * 2006-10-12 2008-04-24 Mitsutoyo Corp 三次元センサおよび接触プローブ

Also Published As

Publication number Publication date
JPH026002B2 (enrdf_load_stackoverflow) 1990-02-07

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