JPH0442469B2 - - Google Patents

Info

Publication number
JPH0442469B2
JPH0442469B2 JP58180393A JP18039383A JPH0442469B2 JP H0442469 B2 JPH0442469 B2 JP H0442469B2 JP 58180393 A JP58180393 A JP 58180393A JP 18039383 A JP18039383 A JP 18039383A JP H0442469 B2 JPH0442469 B2 JP H0442469B2
Authority
JP
Japan
Prior art keywords
bcl
thin film
tac
color
tibn
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58180393A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6075579A (ja
Inventor
Yasuhisa Shiraishi
Takashi Fujita
Yoshiharu Ochi
Masahiko Hirose
Katsutaro Ichihara
Takashi Ishigami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP18039383A priority Critical patent/JPS6075579A/ja
Publication of JPS6075579A publication Critical patent/JPS6075579A/ja
Publication of JPH0442469B2 publication Critical patent/JPH0442469B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/38—Borides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP18039383A 1983-09-30 1983-09-30 金色装飾品 Granted JPS6075579A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18039383A JPS6075579A (ja) 1983-09-30 1983-09-30 金色装飾品

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18039383A JPS6075579A (ja) 1983-09-30 1983-09-30 金色装飾品

Publications (2)

Publication Number Publication Date
JPS6075579A JPS6075579A (ja) 1985-04-27
JPH0442469B2 true JPH0442469B2 (enExample) 1992-07-13

Family

ID=16082448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18039383A Granted JPS6075579A (ja) 1983-09-30 1983-09-30 金色装飾品

Country Status (1)

Country Link
JP (1) JPS6075579A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2748213B2 (ja) * 1993-05-24 1998-05-06 日本レーザ電子株式会社 プラズマ製膜装置
FR2726579A1 (fr) * 1994-11-07 1996-05-10 Neuville Stephane Procede de depot d'un revetement protecteur de type pseudo carbonne diamant amorphe
FR2726834B1 (fr) * 1994-11-07 1997-07-18 Neuville Stephane Procede de depot sur au moins une piece d'un revetement protecteur de grande durete

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4841770A (enExample) * 1971-09-27 1973-06-18

Also Published As

Publication number Publication date
JPS6075579A (ja) 1985-04-27

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