JPH0441510B2 - - Google Patents

Info

Publication number
JPH0441510B2
JPH0441510B2 JP58177245A JP17724583A JPH0441510B2 JP H0441510 B2 JPH0441510 B2 JP H0441510B2 JP 58177245 A JP58177245 A JP 58177245A JP 17724583 A JP17724583 A JP 17724583A JP H0441510 B2 JPH0441510 B2 JP H0441510B2
Authority
JP
Japan
Prior art keywords
silicon
wiring layer
aluminum
contact
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58177245A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6068614A (ja
Inventor
Hajime Kamioka
Kazunari Shirai
Shigeo Kashiwagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP17724583A priority Critical patent/JPS6068614A/ja
Publication of JPS6068614A publication Critical patent/JPS6068614A/ja
Publication of JPH0441510B2 publication Critical patent/JPH0441510B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP17724583A 1983-09-26 1983-09-26 半導体装置の製造方法 Granted JPS6068614A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17724583A JPS6068614A (ja) 1983-09-26 1983-09-26 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17724583A JPS6068614A (ja) 1983-09-26 1983-09-26 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6068614A JPS6068614A (ja) 1985-04-19
JPH0441510B2 true JPH0441510B2 (en, 2012) 1992-07-08

Family

ID=16027687

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17724583A Granted JPS6068614A (ja) 1983-09-26 1983-09-26 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6068614A (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW520072U (en) * 1991-07-08 2003-02-01 Samsung Electronics Co Ltd A semiconductor device having a multi-layer metal contact
KR950009934B1 (ko) * 1992-09-07 1995-09-01 삼성전자주식회사 반도체 장치의 배선층 형성방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57186357A (en) * 1981-05-11 1982-11-16 Yamagata Nippon Denki Kk Semiconductor element

Also Published As

Publication number Publication date
JPS6068614A (ja) 1985-04-19

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees