JPH044099B2 - - Google Patents

Info

Publication number
JPH044099B2
JPH044099B2 JP57033438A JP3343882A JPH044099B2 JP H044099 B2 JPH044099 B2 JP H044099B2 JP 57033438 A JP57033438 A JP 57033438A JP 3343882 A JP3343882 A JP 3343882A JP H044099 B2 JPH044099 B2 JP H044099B2
Authority
JP
Japan
Prior art keywords
workpiece
holding plate
holding
top plate
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57033438A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58126063A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP57033438A priority Critical patent/JPS58126063A/ja
Publication of JPS58126063A publication Critical patent/JPS58126063A/ja
Publication of JPH044099B2 publication Critical patent/JPH044099B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B24B37/345—Feeding, loading or unloading work specially adapted to lapping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP57033438A 1982-03-03 1982-03-03 研摩機用ワ−クピ−ス・ロ−デイング装置 Granted JPS58126063A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57033438A JPS58126063A (ja) 1982-03-03 1982-03-03 研摩機用ワ−クピ−ス・ロ−デイング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57033438A JPS58126063A (ja) 1982-03-03 1982-03-03 研摩機用ワ−クピ−ス・ロ−デイング装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57006436A Division JPS58126062A (ja) 1982-01-19 1982-01-19 研摩装置

Publications (2)

Publication Number Publication Date
JPS58126063A JPS58126063A (ja) 1983-07-27
JPH044099B2 true JPH044099B2 (enrdf_load_stackoverflow) 1992-01-27

Family

ID=12386535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57033438A Granted JPS58126063A (ja) 1982-03-03 1982-03-03 研摩機用ワ−クピ−ス・ロ−デイング装置

Country Status (1)

Country Link
JP (1) JPS58126063A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE38878E1 (en) 1992-09-24 2005-11-15 Ebara Corporation Polishing apparatus
JPH0919862A (ja) * 1995-07-07 1997-01-21 Ebara Corp ポリッシング装置のロード・アンロードユニット
CN109202694B (zh) * 2018-09-27 2020-07-24 江西龙正科技发展有限公司 一种多层纳米纤维化学机械抛光垫

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5548572A (en) * 1978-09-26 1980-04-07 Fujikoshi Kikai Kogyo Kk Automatic work feeding equipment for lapping machine

Also Published As

Publication number Publication date
JPS58126063A (ja) 1983-07-27

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