JPS58126063A - 研摩機用ワ−クピ−ス・ロ−デイング装置 - Google Patents

研摩機用ワ−クピ−ス・ロ−デイング装置

Info

Publication number
JPS58126063A
JPS58126063A JP57033438A JP3343882A JPS58126063A JP S58126063 A JPS58126063 A JP S58126063A JP 57033438 A JP57033438 A JP 57033438A JP 3343882 A JP3343882 A JP 3343882A JP S58126063 A JPS58126063 A JP S58126063A
Authority
JP
Japan
Prior art keywords
workpiece
holding
arm
polishing
top plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57033438A
Other languages
English (en)
Japanese (ja)
Other versions
JPH044099B2 (enrdf_load_stackoverflow
Inventor
Yasuyuki Onomi
尾身　康行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikoshi Machinery Corp
Original Assignee
Fujikoshi Kikai Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikoshi Kikai Kogyo KK filed Critical Fujikoshi Kikai Kogyo KK
Priority to JP57033438A priority Critical patent/JPS58126063A/ja
Publication of JPS58126063A publication Critical patent/JPS58126063A/ja
Publication of JPH044099B2 publication Critical patent/JPH044099B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B24B37/345—Feeding, loading or unloading work specially adapted to lapping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP57033438A 1982-03-03 1982-03-03 研摩機用ワ−クピ−ス・ロ−デイング装置 Granted JPS58126063A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57033438A JPS58126063A (ja) 1982-03-03 1982-03-03 研摩機用ワ−クピ−ス・ロ−デイング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57033438A JPS58126063A (ja) 1982-03-03 1982-03-03 研摩機用ワ−クピ−ス・ロ−デイング装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57006436A Division JPS58126062A (ja) 1982-01-19 1982-01-19 研摩装置

Publications (2)

Publication Number Publication Date
JPS58126063A true JPS58126063A (ja) 1983-07-27
JPH044099B2 JPH044099B2 (enrdf_load_stackoverflow) 1992-01-27

Family

ID=12386535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57033438A Granted JPS58126063A (ja) 1982-03-03 1982-03-03 研摩機用ワ−クピ−ス・ロ−デイング装置

Country Status (1)

Country Link
JP (1) JPS58126063A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5779426A (en) * 1995-07-07 1998-07-14 Ebara Corporation Loading and unloading unit for polishing apparatus
USRE38878E1 (en) 1992-09-24 2005-11-15 Ebara Corporation Polishing apparatus
CN109202694A (zh) * 2018-09-27 2019-01-15 安伟 一种多层纳米纤维化学机械抛光垫

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5548572A (en) * 1978-09-26 1980-04-07 Fujikoshi Kikai Kogyo Kk Automatic work feeding equipment for lapping machine

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5548572A (en) * 1978-09-26 1980-04-07 Fujikoshi Kikai Kogyo Kk Automatic work feeding equipment for lapping machine

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE38878E1 (en) 1992-09-24 2005-11-15 Ebara Corporation Polishing apparatus
US5779426A (en) * 1995-07-07 1998-07-14 Ebara Corporation Loading and unloading unit for polishing apparatus
CN109202694A (zh) * 2018-09-27 2019-01-15 安伟 一种多层纳米纤维化学机械抛光垫
CN109202694B (zh) * 2018-09-27 2020-07-24 江西龙正科技发展有限公司 一种多层纳米纤维化学机械抛光垫

Also Published As

Publication number Publication date
JPH044099B2 (enrdf_load_stackoverflow) 1992-01-27

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