JPH0440269Y2 - - Google Patents
Info
- Publication number
- JPH0440269Y2 JPH0440269Y2 JP10634386U JP10634386U JPH0440269Y2 JP H0440269 Y2 JPH0440269 Y2 JP H0440269Y2 JP 10634386 U JP10634386 U JP 10634386U JP 10634386 U JP10634386 U JP 10634386U JP H0440269 Y2 JPH0440269 Y2 JP H0440269Y2
- Authority
- JP
- Japan
- Prior art keywords
- fan
- tube
- straight pipe
- sectional area
- internal cross
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 12
- 239000010453 quartz Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 8
- 239000000843 powder Substances 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Nozzles For Electric Vacuum Cleaners (AREA)
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10634386U JPH0440269Y2 (enrdf_load_stackoverflow) | 1986-07-11 | 1986-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10634386U JPH0440269Y2 (enrdf_load_stackoverflow) | 1986-07-11 | 1986-07-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6312830U JPS6312830U (enrdf_load_stackoverflow) | 1988-01-27 |
| JPH0440269Y2 true JPH0440269Y2 (enrdf_load_stackoverflow) | 1992-09-21 |
Family
ID=30981610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10634386U Expired JPH0440269Y2 (enrdf_load_stackoverflow) | 1986-07-11 | 1986-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0440269Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-07-11 JP JP10634386U patent/JPH0440269Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6312830U (enrdf_load_stackoverflow) | 1988-01-27 |
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