JPH0438717B2 - - Google Patents

Info

Publication number
JPH0438717B2
JPH0438717B2 JP61010774A JP1077486A JPH0438717B2 JP H0438717 B2 JPH0438717 B2 JP H0438717B2 JP 61010774 A JP61010774 A JP 61010774A JP 1077486 A JP1077486 A JP 1077486A JP H0438717 B2 JPH0438717 B2 JP H0438717B2
Authority
JP
Japan
Prior art keywords
crucible
pedestal
shaft
single crystal
crucible shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61010774A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62167285A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP61010774A priority Critical patent/JPS62167285A/ja
Publication of JPS62167285A publication Critical patent/JPS62167285A/ja
Publication of JPH0438717B2 publication Critical patent/JPH0438717B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP61010774A 1986-01-20 1986-01-20 ペデイスタル固定方法 Granted JPS62167285A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61010774A JPS62167285A (ja) 1986-01-20 1986-01-20 ペデイスタル固定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61010774A JPS62167285A (ja) 1986-01-20 1986-01-20 ペデイスタル固定方法

Publications (2)

Publication Number Publication Date
JPS62167285A JPS62167285A (ja) 1987-07-23
JPH0438717B2 true JPH0438717B2 (enExample) 1992-06-25

Family

ID=11759675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61010774A Granted JPS62167285A (ja) 1986-01-20 1986-01-20 ペデイスタル固定方法

Country Status (1)

Country Link
JP (1) JPS62167285A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2539121B2 (ja) * 1991-09-19 1996-10-02 株式会社日立製作所 超伝導磁石
CN102312287A (zh) * 2011-07-04 2012-01-11 浙江晶盛机电股份有限公司 具备改进的水冷却结构的坩埚轴
JP2016199440A (ja) * 2015-04-13 2016-12-01 住友金属鉱山株式会社 結晶育成装置

Also Published As

Publication number Publication date
JPS62167285A (ja) 1987-07-23

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term