JPH0438518Y2 - - Google Patents

Info

Publication number
JPH0438518Y2
JPH0438518Y2 JP1983039595U JP3959583U JPH0438518Y2 JP H0438518 Y2 JPH0438518 Y2 JP H0438518Y2 JP 1983039595 U JP1983039595 U JP 1983039595U JP 3959583 U JP3959583 U JP 3959583U JP H0438518 Y2 JPH0438518 Y2 JP H0438518Y2
Authority
JP
Japan
Prior art keywords
cleaning
wafers
wafer
main body
divided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983039595U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59146941U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3959583U priority Critical patent/JPS59146941U/ja
Publication of JPS59146941U publication Critical patent/JPS59146941U/ja
Application granted granted Critical
Publication of JPH0438518Y2 publication Critical patent/JPH0438518Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP3959583U 1983-03-22 1983-03-22 半導体洗浄治具 Granted JPS59146941U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3959583U JPS59146941U (ja) 1983-03-22 1983-03-22 半導体洗浄治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3959583U JPS59146941U (ja) 1983-03-22 1983-03-22 半導体洗浄治具

Publications (2)

Publication Number Publication Date
JPS59146941U JPS59146941U (ja) 1984-10-01
JPH0438518Y2 true JPH0438518Y2 (enEXAMPLES) 1992-09-09

Family

ID=30170233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3959583U Granted JPS59146941U (ja) 1983-03-22 1983-03-22 半導体洗浄治具

Country Status (1)

Country Link
JP (1) JPS59146941U (enEXAMPLES)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5285477A (en) * 1976-01-09 1977-07-15 Senken Kk Wafer carrying container for integrated circuit

Also Published As

Publication number Publication date
JPS59146941U (ja) 1984-10-01

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