JPH0436817B2 - - Google Patents
Info
- Publication number
- JPH0436817B2 JPH0436817B2 JP23683485A JP23683485A JPH0436817B2 JP H0436817 B2 JPH0436817 B2 JP H0436817B2 JP 23683485 A JP23683485 A JP 23683485A JP 23683485 A JP23683485 A JP 23683485A JP H0436817 B2 JPH0436817 B2 JP H0436817B2
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- hole
- vacuum
- ventilation hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23683485A JPS6299039A (ja) | 1985-10-23 | 1985-10-23 | バキユ−ムチヤツク |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23683485A JPS6299039A (ja) | 1985-10-23 | 1985-10-23 | バキユ−ムチヤツク |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6299039A JPS6299039A (ja) | 1987-05-08 |
| JPH0436817B2 true JPH0436817B2 (enExample) | 1992-06-17 |
Family
ID=17006472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23683485A Granted JPS6299039A (ja) | 1985-10-23 | 1985-10-23 | バキユ−ムチヤツク |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6299039A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH081464A (ja) * | 1992-06-17 | 1996-01-09 | Shibayama Kikai Kk | ユニバーサルチャック機構の自動切換装置 |
| JP6189727B2 (ja) * | 2013-11-26 | 2017-08-30 | コマツNtc株式会社 | ユニバーサルチャック装置 |
| CN111745433A (zh) * | 2020-07-13 | 2020-10-09 | 广州百士臣科技有限公司 | 一种用于立式钻床的稳定型夹持装置 |
-
1985
- 1985-10-23 JP JP23683485A patent/JPS6299039A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6299039A (ja) | 1987-05-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6164633A (en) | Multiple size wafer vacuum chuck | |
| TWI471931B (zh) | 基板處理裝置及基板處理方法 | |
| US5443416A (en) | Rotary union for coupling fluids in a wafer polishing apparatus | |
| US7914694B2 (en) | Semiconductor wafer handler | |
| JPS6233182B2 (enExample) | ||
| JPH0436817B2 (enExample) | ||
| JP2000232083A (ja) | 半導体ウエハのユニバーサルチャック機構 | |
| CN111063647A (zh) | 伯努利机械手在真空卡盘上放取晶圆的系统和方法 | |
| JPH09162269A (ja) | チャックテーブル | |
| JPH08153992A (ja) | 真空チャックの吸着プレート | |
| CN210897234U (zh) | 伯努利机械手在真空卡盘上放取晶圆的系统 | |
| JP2003257909A (ja) | 半導体ウェーハの加工装置 | |
| TWI680500B (zh) | 基板處理裝置及基板處理方法 | |
| JPH081464A (ja) | ユニバーサルチャック機構の自動切換装置 | |
| JP2005050855A (ja) | 吸着搬送装置 | |
| JP2003088793A (ja) | 基板処理装置および基板処理方法 | |
| JPS61182738A (ja) | ウエハのフリ−サイズチヤツク機構 | |
| JPH05315434A (ja) | 半導体ウェーハ保持具 | |
| US20080051018A1 (en) | Semiconductor Wafer Handler | |
| JPH11274280A (ja) | ワーク用バキュームチャック装置 | |
| JPH11260896A (ja) | ウエハのチャック機構 | |
| JP2002066912A (ja) | 半導体ウェーハの加工装置 | |
| JPS62219634A (ja) | 真空保持装置 | |
| JP2004319930A (ja) | 基板用洗浄・乾燥装置 | |
| JPH03209741A (ja) | 真空吸着装置 |