JPH0436817B2 - - Google Patents

Info

Publication number
JPH0436817B2
JPH0436817B2 JP23683485A JP23683485A JPH0436817B2 JP H0436817 B2 JPH0436817 B2 JP H0436817B2 JP 23683485 A JP23683485 A JP 23683485A JP 23683485 A JP23683485 A JP 23683485A JP H0436817 B2 JPH0436817 B2 JP H0436817B2
Authority
JP
Japan
Prior art keywords
chuck
pocket
hole
vacuum
ventilation hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP23683485A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6299039A (ja
Inventor
Kyoshi Nishio
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Astemo Ltd
Original Assignee
Nissin Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Kogyo Co Ltd filed Critical Nissin Kogyo Co Ltd
Priority to JP23683485A priority Critical patent/JPS6299039A/ja
Publication of JPS6299039A publication Critical patent/JPS6299039A/ja
Publication of JPH0436817B2 publication Critical patent/JPH0436817B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP23683485A 1985-10-23 1985-10-23 バキユ−ムチヤツク Granted JPS6299039A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23683485A JPS6299039A (ja) 1985-10-23 1985-10-23 バキユ−ムチヤツク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23683485A JPS6299039A (ja) 1985-10-23 1985-10-23 バキユ−ムチヤツク

Publications (2)

Publication Number Publication Date
JPS6299039A JPS6299039A (ja) 1987-05-08
JPH0436817B2 true JPH0436817B2 (enExample) 1992-06-17

Family

ID=17006472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23683485A Granted JPS6299039A (ja) 1985-10-23 1985-10-23 バキユ−ムチヤツク

Country Status (1)

Country Link
JP (1) JPS6299039A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH081464A (ja) * 1992-06-17 1996-01-09 Shibayama Kikai Kk ユニバーサルチャック機構の自動切換装置
JP6189727B2 (ja) * 2013-11-26 2017-08-30 コマツNtc株式会社 ユニバーサルチャック装置
CN111745433A (zh) * 2020-07-13 2020-10-09 广州百士臣科技有限公司 一种用于立式钻床的稳定型夹持装置

Also Published As

Publication number Publication date
JPS6299039A (ja) 1987-05-08

Similar Documents

Publication Publication Date Title
US6164633A (en) Multiple size wafer vacuum chuck
TWI471931B (zh) 基板處理裝置及基板處理方法
US5443416A (en) Rotary union for coupling fluids in a wafer polishing apparatus
US7914694B2 (en) Semiconductor wafer handler
JPS6233182B2 (enExample)
JPH0436817B2 (enExample)
JP2000232083A (ja) 半導体ウエハのユニバーサルチャック機構
CN111063647A (zh) 伯努利机械手在真空卡盘上放取晶圆的系统和方法
JPH09162269A (ja) チャックテーブル
JPH08153992A (ja) 真空チャックの吸着プレート
CN210897234U (zh) 伯努利机械手在真空卡盘上放取晶圆的系统
JP2003257909A (ja) 半導体ウェーハの加工装置
TWI680500B (zh) 基板處理裝置及基板處理方法
JPH081464A (ja) ユニバーサルチャック機構の自動切換装置
JP2005050855A (ja) 吸着搬送装置
JP2003088793A (ja) 基板処理装置および基板処理方法
JPS61182738A (ja) ウエハのフリ−サイズチヤツク機構
JPH05315434A (ja) 半導体ウェーハ保持具
US20080051018A1 (en) Semiconductor Wafer Handler
JPH11274280A (ja) ワーク用バキュームチャック装置
JPH11260896A (ja) ウエハのチャック機構
JP2002066912A (ja) 半導体ウェーハの加工装置
JPS62219634A (ja) 真空保持装置
JP2004319930A (ja) 基板用洗浄・乾燥装置
JPH03209741A (ja) 真空吸着装置