JPS6299039A - バキユ−ムチヤツク - Google Patents
バキユ−ムチヤツクInfo
- Publication number
- JPS6299039A JPS6299039A JP23683485A JP23683485A JPS6299039A JP S6299039 A JPS6299039 A JP S6299039A JP 23683485 A JP23683485 A JP 23683485A JP 23683485 A JP23683485 A JP 23683485A JP S6299039 A JPS6299039 A JP S6299039A
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- hole
- disk
- chuck base
- thin disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004891 communication Methods 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 14
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 238000009423 ventilation Methods 0.000 description 34
- 238000003780 insertion Methods 0.000 description 11
- 230000037431 insertion Effects 0.000 description 11
- 235000012431 wafers Nutrition 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 101150055505 RFS1 gene Proteins 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23683485A JPS6299039A (ja) | 1985-10-23 | 1985-10-23 | バキユ−ムチヤツク |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23683485A JPS6299039A (ja) | 1985-10-23 | 1985-10-23 | バキユ−ムチヤツク |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6299039A true JPS6299039A (ja) | 1987-05-08 |
| JPH0436817B2 JPH0436817B2 (enExample) | 1992-06-17 |
Family
ID=17006472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23683485A Granted JPS6299039A (ja) | 1985-10-23 | 1985-10-23 | バキユ−ムチヤツク |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6299039A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH081464A (ja) * | 1992-06-17 | 1996-01-09 | Shibayama Kikai Kk | ユニバーサルチャック機構の自動切換装置 |
| JP2015103682A (ja) * | 2013-11-26 | 2015-06-04 | コマツNtc株式会社 | ユニバーサルチャック装置 |
| CN111745433A (zh) * | 2020-07-13 | 2020-10-09 | 广州百士臣科技有限公司 | 一种用于立式钻床的稳定型夹持装置 |
-
1985
- 1985-10-23 JP JP23683485A patent/JPS6299039A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH081464A (ja) * | 1992-06-17 | 1996-01-09 | Shibayama Kikai Kk | ユニバーサルチャック機構の自動切換装置 |
| JP2015103682A (ja) * | 2013-11-26 | 2015-06-04 | コマツNtc株式会社 | ユニバーサルチャック装置 |
| CN111745433A (zh) * | 2020-07-13 | 2020-10-09 | 广州百士臣科技有限公司 | 一种用于立式钻床的稳定型夹持装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0436817B2 (enExample) | 1992-06-17 |
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