JPH0435683B2 - - Google Patents
Info
- Publication number
- JPH0435683B2 JPH0435683B2 JP25653686A JP25653686A JPH0435683B2 JP H0435683 B2 JPH0435683 B2 JP H0435683B2 JP 25653686 A JP25653686 A JP 25653686A JP 25653686 A JP25653686 A JP 25653686A JP H0435683 B2 JPH0435683 B2 JP H0435683B2
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- measured
- wavelength
- detector
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 description 10
- 239000006185 dispersion Substances 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 2
- 238000012951 Remeasurement Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25653686A JPS63109304A (ja) | 1986-10-27 | 1986-10-27 | 膜厚測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25653686A JPS63109304A (ja) | 1986-10-27 | 1986-10-27 | 膜厚測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63109304A JPS63109304A (ja) | 1988-05-14 |
JPH0435683B2 true JPH0435683B2 (cs) | 1992-06-11 |
Family
ID=17293987
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25653686A Granted JPS63109304A (ja) | 1986-10-27 | 1986-10-27 | 膜厚測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63109304A (cs) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009149951A (ja) * | 2007-12-21 | 2009-07-09 | Mitsubishi Heavy Ind Ltd | 製膜装置の膜厚調整方法 |
CN102171000A (zh) * | 2008-10-01 | 2011-08-31 | 彼特沃尔特斯有限公司 | 用于测量片状工件的厚度的方法 |
-
1986
- 1986-10-27 JP JP25653686A patent/JPS63109304A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS63109304A (ja) | 1988-05-14 |
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