JPH0466285B2 - - Google Patents

Info

Publication number
JPH0466285B2
JPH0466285B2 JP61196150A JP19615086A JPH0466285B2 JP H0466285 B2 JPH0466285 B2 JP H0466285B2 JP 61196150 A JP61196150 A JP 61196150A JP 19615086 A JP19615086 A JP 19615086A JP H0466285 B2 JPH0466285 B2 JP H0466285B2
Authority
JP
Japan
Prior art keywords
measured
light
film thickness
refractive index
interference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61196150A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6350706A (ja
Inventor
Isao Hishikari
Toshihiko Ide
Kosei Aikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Corp
Original Assignee
Chino Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Corp filed Critical Chino Corp
Priority to JP19615086A priority Critical patent/JPS6350706A/ja
Publication of JPS6350706A publication Critical patent/JPS6350706A/ja
Publication of JPH0466285B2 publication Critical patent/JPH0466285B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP19615086A 1986-08-21 1986-08-21 膜厚測定装置 Granted JPS6350706A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19615086A JPS6350706A (ja) 1986-08-21 1986-08-21 膜厚測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19615086A JPS6350706A (ja) 1986-08-21 1986-08-21 膜厚測定装置

Publications (2)

Publication Number Publication Date
JPS6350706A JPS6350706A (ja) 1988-03-03
JPH0466285B2 true JPH0466285B2 (cs) 1992-10-22

Family

ID=16353041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19615086A Granted JPS6350706A (ja) 1986-08-21 1986-08-21 膜厚測定装置

Country Status (1)

Country Link
JP (1) JPS6350706A (cs)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4838169A (cs) * 1971-09-16 1973-06-05
JPS6176905A (ja) * 1984-09-21 1986-04-19 Oak Seisakusho:Kk 膜厚測定の方法

Also Published As

Publication number Publication date
JPS6350706A (ja) 1988-03-03

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