JPH0434816B2 - - Google Patents

Info

Publication number
JPH0434816B2
JPH0434816B2 JP20791483A JP20791483A JPH0434816B2 JP H0434816 B2 JPH0434816 B2 JP H0434816B2 JP 20791483 A JP20791483 A JP 20791483A JP 20791483 A JP20791483 A JP 20791483A JP H0434816 B2 JPH0434816 B2 JP H0434816B2
Authority
JP
Japan
Prior art keywords
chemical
tank
chemical liquid
partition walls
arms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20791483A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60100431A (ja
Inventor
Yasuo Taki
Yoshio Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP20791483A priority Critical patent/JPS60100431A/ja
Publication of JPS60100431A publication Critical patent/JPS60100431A/ja
Publication of JPH0434816B2 publication Critical patent/JPH0434816B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP20791483A 1983-11-04 1983-11-04 物品薬液処理装置 Granted JPS60100431A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20791483A JPS60100431A (ja) 1983-11-04 1983-11-04 物品薬液処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20791483A JPS60100431A (ja) 1983-11-04 1983-11-04 物品薬液処理装置

Publications (2)

Publication Number Publication Date
JPS60100431A JPS60100431A (ja) 1985-06-04
JPH0434816B2 true JPH0434816B2 (enrdf_load_stackoverflow) 1992-06-09

Family

ID=16547650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20791483A Granted JPS60100431A (ja) 1983-11-04 1983-11-04 物品薬液処理装置

Country Status (1)

Country Link
JP (1) JPS60100431A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH065671B2 (ja) * 1988-04-15 1994-01-19 大日本スクリーン製造株式会社 浸漬式基板処理装置

Also Published As

Publication number Publication date
JPS60100431A (ja) 1985-06-04

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