JPH0434815B2 - - Google Patents

Info

Publication number
JPH0434815B2
JPH0434815B2 JP59124551A JP12455184A JPH0434815B2 JP H0434815 B2 JPH0434815 B2 JP H0434815B2 JP 59124551 A JP59124551 A JP 59124551A JP 12455184 A JP12455184 A JP 12455184A JP H0434815 B2 JPH0434815 B2 JP H0434815B2
Authority
JP
Japan
Prior art keywords
transparent conductive
conductive film
metal thin
thin film
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59124551A
Other languages
English (en)
Japanese (ja)
Other versions
JPS614233A (ja
Inventor
Toshio Yanagisawa
Keiji Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP59124551A priority Critical patent/JPS614233A/ja
Publication of JPS614233A publication Critical patent/JPS614233A/ja
Publication of JPH0434815B2 publication Critical patent/JPH0434815B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/642—

Landscapes

  • Weting (AREA)
JP59124551A 1984-06-19 1984-06-19 透明導電膜のエツチング方法 Granted JPS614233A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59124551A JPS614233A (ja) 1984-06-19 1984-06-19 透明導電膜のエツチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59124551A JPS614233A (ja) 1984-06-19 1984-06-19 透明導電膜のエツチング方法

Publications (2)

Publication Number Publication Date
JPS614233A JPS614233A (ja) 1986-01-10
JPH0434815B2 true JPH0434815B2 (OSRAM) 1992-06-09

Family

ID=14888275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59124551A Granted JPS614233A (ja) 1984-06-19 1984-06-19 透明導電膜のエツチング方法

Country Status (1)

Country Link
JP (1) JPS614233A (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0660381A1 (en) * 1993-12-21 1995-06-28 Koninklijke Philips Electronics N.V. Method of manufacturing a transparent conductor pattern and a liquid crystal display device
JP3456804B2 (ja) * 1995-07-31 2003-10-14 旭電化工業株式会社 酸化物エッチング製品の製造方法および装置
KR100513051B1 (ko) * 1998-12-30 2005-10-26 주식회사 하이닉스반도체 반도체 소자의 게이트 전극 형성 방법_
JP2001044166A (ja) 1999-07-29 2001-02-16 Nec Akita Ltd 導電膜パターンの形成方法

Also Published As

Publication number Publication date
JPS614233A (ja) 1986-01-10

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees