JPH0426554B2 - - Google Patents

Info

Publication number
JPH0426554B2
JPH0426554B2 JP12723885A JP12723885A JPH0426554B2 JP H0426554 B2 JPH0426554 B2 JP H0426554B2 JP 12723885 A JP12723885 A JP 12723885A JP 12723885 A JP12723885 A JP 12723885A JP H0426554 B2 JPH0426554 B2 JP H0426554B2
Authority
JP
Japan
Prior art keywords
film
polysilicon
melting point
oxide film
point metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12723885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61287172A (ja
Inventor
Hiroaki Ootsuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP12723885A priority Critical patent/JPS61287172A/ja
Publication of JPS61287172A publication Critical patent/JPS61287172A/ja
Publication of JPH0426554B2 publication Critical patent/JPH0426554B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
JP12723885A 1985-06-13 1985-06-13 高融点金属ゲ−トｍｏｓ半導体装置の製造方法 Granted JPS61287172A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12723885A JPS61287172A (ja) 1985-06-13 1985-06-13 高融点金属ゲ−トｍｏｓ半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12723885A JPS61287172A (ja) 1985-06-13 1985-06-13 高融点金属ゲ−トｍｏｓ半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS61287172A JPS61287172A (ja) 1986-12-17
JPH0426554B2 true JPH0426554B2 (enrdf_load_stackoverflow) 1992-05-07

Family

ID=14955130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12723885A Granted JPS61287172A (ja) 1985-06-13 1985-06-13 高融点金属ゲ−トｍｏｓ半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61287172A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01103873A (ja) * 1987-06-23 1989-04-20 Matsushita Electric Ind Co Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS61287172A (ja) 1986-12-17

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