JPH0426533U - - Google Patents
Info
- Publication number
- JPH0426533U JPH0426533U JP6812190U JP6812190U JPH0426533U JP H0426533 U JPH0426533 U JP H0426533U JP 6812190 U JP6812190 U JP 6812190U JP 6812190 U JP6812190 U JP 6812190U JP H0426533 U JPH0426533 U JP H0426533U
- Authority
- JP
- Japan
- Prior art keywords
- forks
- fork
- furnace
- manufacturing equipment
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000002791 soaking Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002516 radical scavenger Substances 0.000 description 1
Description
第１図および第２図はこの考案の異なる実施例
の半導体製造装置の縦断面図である。第３図は従
来一般の半導体熱処理装置の縦断面図である。
１……炉芯管、３……スカベンジヤ、４……炉
体、６……フオーク、７……均熱域を形成するヒ
ータ、８……均熱域、９……製品ウエーハ、１０
……ボート、１１……フオーク予熱用外部ヒータ
、１２……フオーク予熱用内部ヒータ。
1 and 2 are longitudinal cross-sectional views of semiconductor manufacturing equipment of different embodiments of this invention. FIG. 3 is a longitudinal sectional view of a conventional general semiconductor heat treatment apparatus. DESCRIPTION OF SYMBOLS 1... Furnace core tube, 3... Scavenger, 4... Furnace body, 6... Fork, 7... Heater forming a soaking area, 8... Soaking area, 9... Product wafer, 10
... Boat, 11 ... External heater for fork preheating, 12 ... Internal heater for fork preheating.
Claims (1)
出炉させるソフトランデイング方式の装置におい
て、 フオークの予熱機構を有し、フオークの昇温が
可能であることを特徴とする半導体製造装置。[Claim for Utility Model Registration] A soft landing type device in which product wafers are mounted on forks and placed in and out of the furnace, characterized by having a fork preheating mechanism and capable of raising the temperature of the forks. semiconductor manufacturing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6812190U JPH0426533U (en) | 1990-06-27 | 1990-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6812190U JPH0426533U (en) | 1990-06-27 | 1990-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0426533U true JPH0426533U (en) | 1992-03-03 |
Family
ID=31602288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6812190U Pending JPH0426533U (en) | 1990-06-27 | 1990-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0426533U (en) |
-
1990
- 1990-06-27 JP JP6812190U patent/JPH0426533U/ja active Pending