JPS63149523U - - Google Patents
Info
- Publication number
- JPS63149523U JPS63149523U JP4310987U JP4310987U JPS63149523U JP S63149523 U JPS63149523 U JP S63149523U JP 4310987 U JP4310987 U JP 4310987U JP 4310987 U JP4310987 U JP 4310987U JP S63149523 U JPS63149523 U JP S63149523U
- Authority
- JP
- Japan
- Prior art keywords
- furnace core
- core tube
- houses
- auxiliary
- tube body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Description
第１図は本考案の一実施例の炉芯管を用いた熱
処理装置の断面図、第２図は第１図に示した炉芯
管の側断面図、第３図は本考案の他の実施例とし
ての炉芯管の側断面図である。第４図は従来例の
熱処理装置の断面図、第５図は炉芯管本体内部の
温度分布図、第６図は他の従来例の熱処理装置の
断面図である。
１……炉芯管本体、２，８ａ，８ｂ……補助管
、３……温度検知部（熱電対）、５……炉体、６
……均熱管、７……ヒーター、Ａ……半導体ウエ
ハ、Ｂ……マザーボート。
Fig. 1 is a sectional view of a heat treatment apparatus using a furnace core tube according to an embodiment of the present invention, Fig. 2 is a side sectional view of the furnace core tube shown in Fig. 1, and Fig. 3 is a cross-sectional view of a heat treatment apparatus using a furnace core tube according to an embodiment of the present invention. FIG. 3 is a side sectional view of a furnace core tube as an example. FIG. 4 is a sectional view of a conventional heat treatment apparatus, FIG. 5 is a temperature distribution diagram inside the furnace core tube body, and FIG. 6 is a sectional view of another conventional heat treatment apparatus. 1... Furnace core tube body, 2, 8a, 8b... Auxiliary tube, 3... Temperature detection section (thermocouple), 5... Furnace body, 6
...Soaking tube, 7...Heater, A...Semiconductor wafer, B...Mother boat.
Claims (1)
、温度検知部を収納する補助管を備えていること
を特徴とする炉芯管。 (2) 前記補助管が、炉芯管本体の長さ方向に沿
つて複数個平行に設けられていることを特徴とす
る実用新案登録請求の範囲第１項記載の炉芯管。[Scope of Claim for Utility Model Registration] (1) A furnace core tube characterized in that an auxiliary tube that houses a temperature detection section is provided in a furnace core tube body that houses an object to be heated inside. (2) The furnace core tube according to claim 1, wherein a plurality of the auxiliary tubes are provided in parallel along the length direction of the furnace core tube body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4310987U JPS63149523U (en) | 1987-03-24 | 1987-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4310987U JPS63149523U (en) | 1987-03-24 | 1987-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63149523U true JPS63149523U (en) | 1988-10-03 |
Family
ID=30859658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4310987U Pending JPS63149523U (en) | 1987-03-24 | 1987-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63149523U (en) |
-
1987
- 1987-03-24 JP JP4310987U patent/JPS63149523U/ja active Pending