JPS6354294U - - Google Patents
Info
- Publication number
- JPS6354294U JPS6354294U JP14818386U JP14818386U JPS6354294U JP S6354294 U JPS6354294 U JP S6354294U JP 14818386 U JP14818386 U JP 14818386U JP 14818386 U JP14818386 U JP 14818386U JP S6354294 U JPS6354294 U JP S6354294U
- Authority
- JP
- Japan
- Prior art keywords
- inert gas
- quartz tube
- housed
- sealed
- maintained
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011261 inert gas Substances 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Description
第１図は本考案に係るヒータの一実施例を示し
た縦断面図、第２図は上記ヒータを使用した半導
体製造装置の縦断面図である。第３図は従来のヒ
ータを使用した半導体製造装置の縦断面図、第４
図は従来のヒータの概略斜視図である。
７……石英管、８……電熱線、２１……温度調
節用ヒータ、２２……不活性ガス。
FIG. 1 is a longitudinal sectional view showing an embodiment of a heater according to the present invention, and FIG. 2 is a longitudinal sectional view of a semiconductor manufacturing apparatus using the above heater. Figure 3 is a vertical cross-sectional view of a semiconductor manufacturing equipment using a conventional heater;
The figure is a schematic perspective view of a conventional heater. 7...Quartz tube, 8...Heating wire, 21...Temperature adjustment heater, 22...Inert gas.
Claims (1)
ータにおいて、上記石英管内に不活性ガスを供給
し、かつ、該不活性ガスを所定の正圧に保持した
ことを特徴とする温度調節用ヒータ。 A temperature regulating heater in which a heat transfer wire is housed and sealed in a quartz tube, characterized in that an inert gas is supplied into the quartz tube and the inert gas is maintained at a predetermined positive pressure. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14818386U JPS6354294U (en) | 1986-09-27 | 1986-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14818386U JPS6354294U (en) | 1986-09-27 | 1986-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6354294U true JPS6354294U (en) | 1988-04-12 |
Family
ID=31062226
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14818386U Pending JPS6354294U (en) | 1986-09-27 | 1986-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6354294U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59214191A (en) * | 1983-04-07 | 1984-12-04 | ルフラン・インコ−ポレ−テツド | Flexible heater cable, flexible heater cable unit and methodof heating liquid |
-
1986
- 1986-09-27 JP JP14818386U patent/JPS6354294U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59214191A (en) * | 1983-04-07 | 1984-12-04 | ルフラン・インコ−ポレ−テツド | Flexible heater cable, flexible heater cable unit and methodof heating liquid |