JPH0221731U - - Google Patents
Info
- Publication number
- JPH0221731U JPH0221731U JP9983988U JP9983988U JPH0221731U JP H0221731 U JPH0221731 U JP H0221731U JP 9983988 U JP9983988 U JP 9983988U JP 9983988 U JP9983988 U JP 9983988U JP H0221731 U JPH0221731 U JP H0221731U
- Authority
- JP
- Japan
- Prior art keywords
- heat
- treatment furnace
- seal
- covering
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000012774 insulation material Substances 0.000 claims description 3
- 239000011162 core material Substances 0.000 claims 2
- 239000012210 heat-resistant fiber Substances 0.000 claims 2
- 239000011810 insulating material Substances 0.000 claims 2
- 239000011888 foil Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Thermal Insulation (AREA)
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
Description
第１図は平型熱処理炉に用いた本考案の一実施
例を示す断面図、第２図は半導体拡散炉に用いた
本考案の別の実施例を示す断面図である。
１……シール断熱材、２……電気炉、３……ヒ
ータ、４……石英管、５……シリコンウエハー、
６……不純物、７……排気。
FIG. 1 is a sectional view showing one embodiment of the present invention used in a flat heat treatment furnace, and FIG. 2 is a sectional view showing another embodiment of the invention used in a semiconductor diffusion furnace. 1... Seal insulation material, 2... Electric furnace, 3... Heater, 4... Quartz tube, 5... Silicon wafer,
6...Impurities, 7...Exhaust.
Claims (1)
の箔で被覆してなることを特徴とする熱処理炉用
シール断熱材。 (2) 上記耐熱性繊維からなる断熱材が、芯材と
該芯材を被覆する被覆材とからなることを特徴と
する請求項１記載の熱処理炉用シール断熱材。[Claims for Utility Model Registration] (1) A seal insulation material for a heat treatment furnace, characterized in that the outer surface of the insulation material made of heat-resistant fibers is covered with metal foil. (2) The seal heat insulating material for a heat treatment furnace according to claim 1, wherein the heat insulating material made of the heat-resistant fiber comprises a core material and a covering material covering the core material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988099839U JPH0745953Y2 (en) | 1988-07-29 | 1988-07-29 | Seal insulation for heat treatment furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988099839U JPH0745953Y2 (en) | 1988-07-29 | 1988-07-29 | Seal insulation for heat treatment furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0221731U true JPH0221731U (en) | 1990-02-14 |
| JPH0745953Y2 JPH0745953Y2 (en) | 1995-10-18 |
Family
ID=31327371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988099839U Expired - Lifetime JPH0745953Y2 (en) | 1988-07-29 | 1988-07-29 | Seal insulation for heat treatment furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0745953Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015230103A (en) * | 2014-06-03 | 2015-12-21 | 日本碍子株式会社 | Heating furnace body |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58138844A (en) * | 1982-02-10 | 1983-08-17 | 株式会社日立製作所 | Vacuum heat insulating material |
| JPS6085837U (en) * | 1983-11-17 | 1985-06-13 | 関西日本電気株式会社 | Heat insulation cap for furnace core tube |
-
1988
- 1988-07-29 JP JP1988099839U patent/JPH0745953Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58138844A (en) * | 1982-02-10 | 1983-08-17 | 株式会社日立製作所 | Vacuum heat insulating material |
| JPS6085837U (en) * | 1983-11-17 | 1985-06-13 | 関西日本電気株式会社 | Heat insulation cap for furnace core tube |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015230103A (en) * | 2014-06-03 | 2015-12-21 | 日本碍子株式会社 | Heating furnace body |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0745953Y2 (en) | 1995-10-18 |