JPS6457635U - - Google Patents
Info
- Publication number
- JPS6457635U JPS6457635U JP15218787U JP15218787U JPS6457635U JP S6457635 U JPS6457635 U JP S6457635U JP 15218787 U JP15218787 U JP 15218787U JP 15218787 U JP15218787 U JP 15218787U JP S6457635 U JPS6457635 U JP S6457635U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- tube
- quartz tube
- covers
- peripheral surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Description
第１図は本考案の一実施例に係る炉芯管を適用
した熱処理炉の縦断面図、第２図は各部材の分光
透過率特性図、第３図は従来の熱処理炉の縦断面
図、第４図は従来の熱処理時の温度の時間変化を
示す線図である。
図中、６……炉芯管、６ａ……石英管、６ｂ…
…コーテイング部。
Fig. 1 is a longitudinal sectional view of a heat treatment furnace to which a furnace core tube according to an embodiment of the present invention is applied, Fig. 2 is a spectral transmittance characteristic diagram of each member, and Fig. 3 is a longitudinal sectional view of a conventional heat treatment furnace. , FIG. 4 is a diagram showing the change in temperature over time during conventional heat treatment. In the figure, 6...furnace core tube, 6a...quartz tube, 6b...
...Coating Department.
Claims (1)
率が高い高融点の部材から成り、上記石英管の外
周面を被覆しているコーテイング部とを備えた炉
芯管。[Scope of Claim for Utility Model Registration] Comprising a quartz tube and a coating part that is made of a high melting point material that transmits near infrared rays well and has higher thermal conductivity than quartz, and covers the outer peripheral surface of the quartz tube. Furnace tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15218787U JPS6457635U (en) | 1987-10-06 | 1987-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15218787U JPS6457635U (en) | 1987-10-06 | 1987-10-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6457635U true JPS6457635U (en) | 1989-04-10 |
Family
ID=31426889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15218787U Pending JPS6457635U (en) | 1987-10-06 | 1987-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6457635U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61266335A (en) * | 1985-05-21 | 1986-11-26 | Toshiba Ceramics Co Ltd | Furnace core tube for producing semiconductor and reproduction thereof |
| JPS6294925A (en) * | 1985-10-21 | 1987-05-01 | Nec Corp | Heat treatment device |
-
1987
- 1987-10-06 JP JP15218787U patent/JPS6457635U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61266335A (en) * | 1985-05-21 | 1986-11-26 | Toshiba Ceramics Co Ltd | Furnace core tube for producing semiconductor and reproduction thereof |
| JPS6294925A (en) * | 1985-10-21 | 1987-05-01 | Nec Corp | Heat treatment device |
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