JPS62186424U - - Google Patents
Info
- Publication number
- JPS62186424U JPS62186424U JP7599186U JP7599186U JPS62186424U JP S62186424 U JPS62186424 U JP S62186424U JP 7599186 U JP7599186 U JP 7599186U JP 7599186 U JP7599186 U JP 7599186U JP S62186424 U JPS62186424 U JP S62186424U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- quartz glass
- glass rods
- intervals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000003466 welding Methods 0.000 claims 1
- 238000002791 soaking Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Description
第１図は本考案の構成をもつ炉芯管の側面図、
第２図は第１図の炉芯管を均熱管内に挿入した状
態の断面図、第３図は従来の炉芯管を均熱管に挿
入した状態の断面図である。
１……炉芯管、２……均熱管、３……シリカ粉
、４……石英ガラス棒。
Figure 1 is a side view of the furnace core tube having the configuration of the present invention.
FIG. 2 is a cross-sectional view of the furnace core tube shown in FIG. 1 inserted into the heat soaking tube, and FIG. 3 is a cross-sectional view of the conventional furnace core tube inserted into the heat soaking tube. 1... Furnace core tube, 2... Soaking tube, 3... Silica powder, 4... Quartz glass rod.
Claims (1)
れる石英ガラス製炉芯管において、中央部の被加
熱部分の外周壁に長手方向に石英ガラス棒を間隔
的に複数本溶接してなることを特徴とする炉芯管
。 (2) 前記石英ガラス棒が５本以上溶接されてい
る実用新案登録請求の範囲第１項記載の炉芯管。[Scope of Claim for Utility Model Registration] (1) In a quartz glass furnace core tube used when heat treating semiconductor wafers, quartz glass rods are arranged at intervals in the longitudinal direction on the outer circumferential wall of the central heated part. A furnace core tube characterized by being made by welding multiple pieces. (2) The furnace core tube according to claim 1, wherein five or more of the quartz glass rods are welded together.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7599186U JPS62186424U (en) | 1986-05-20 | 1986-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7599186U JPS62186424U (en) | 1986-05-20 | 1986-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186424U true JPS62186424U (en) | 1987-11-27 |
Family
ID=30922653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7599186U Pending JPS62186424U (en) | 1986-05-20 | 1986-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186424U (en) |
-
1986
- 1986-05-20 JP JP7599186U patent/JPS62186424U/ja active Pending