JPH0252435U - - Google Patents
Info
- Publication number
- JPH0252435U JPH0252435U JP13273088U JP13273088U JPH0252435U JP H0252435 U JPH0252435 U JP H0252435U JP 13273088 U JP13273088 U JP 13273088U JP 13273088 U JP13273088 U JP 13273088U JP H0252435 U JPH0252435 U JP H0252435U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- quartz
- double
- double quartz
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 2
Description
第１図は本考案の一実施例を説明する炉心管の
断面図、第２図１，２は他の実施例を説明する炉
心管の断面図と側断面図、第３図１〜３は本考案
の作用を説明する炉心管の断面図である。
図において、１は二重石英管、２は石英より軟
化点の高い材料からなる耐熱管、３はヒータであ
る。
Fig. 1 is a sectional view of a core tube explaining one embodiment of the present invention, Figs. 2 1 and 2 are sectional views and side sectional views of a reactor core tube illustrating another embodiment, and Figs. 3 are 1-3. FIG. 2 is a sectional view of a furnace core tube explaining the operation of the present invention. In the figure, 1 is a double quartz tube, 2 is a heat-resistant tube made of a material with a higher softening point than quartz, and 3 is a heater.
Claims (1)
該二重石英管の内管と外管の隙間に挿入された石
英より軟化温度の高い材料からなる耐熱管とを有
することを特徴とする炉心管。 A double quartz tube with an inner tube and an outer tube connected at one end,
A furnace core tube characterized in that it has a heat-resistant tube made of a material having a higher softening temperature than quartz and inserted into the gap between the inner tube and the outer tube of the double quartz tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13273088U JPH0252435U (en) | 1988-10-11 | 1988-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13273088U JPH0252435U (en) | 1988-10-11 | 1988-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252435U true JPH0252435U (en) | 1990-04-16 |
Family
ID=31389962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13273088U Pending JPH0252435U (en) | 1988-10-11 | 1988-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252435U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5735336A (en) * | 1980-08-12 | 1982-02-25 | Toshiba Ceramics Co Ltd | Reaction tube for heat treatment |
| JPS6376319A (en) * | 1986-09-18 | 1988-04-06 | Fujitsu Ltd | Vapor growth system |
| JPS63102224A (en) * | 1986-10-20 | 1988-05-07 | Fuji Photo Film Co Ltd | Manufacturing furnace for semiconductor element |
-
1988
- 1988-10-11 JP JP13273088U patent/JPH0252435U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5735336A (en) * | 1980-08-12 | 1982-02-25 | Toshiba Ceramics Co Ltd | Reaction tube for heat treatment |
| JPS6376319A (en) * | 1986-09-18 | 1988-04-06 | Fujitsu Ltd | Vapor growth system |
| JPS63102224A (en) * | 1986-10-20 | 1988-05-07 | Fuji Photo Film Co Ltd | Manufacturing furnace for semiconductor element |
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