JPS6151689U - - Google Patents
Info
- Publication number
- JPS6151689U JPS6151689U JP13747584U JP13747584U JPS6151689U JP S6151689 U JPS6151689 U JP S6151689U JP 13747584 U JP13747584 U JP 13747584U JP 13747584 U JP13747584 U JP 13747584U JP S6151689 U JPS6151689 U JP S6151689U
- Authority
- JP
- Japan
- Prior art keywords
- crystal growth
- heat sink
- core tube
- cylindrical shape
- predetermined temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims 2
- 239000002470 thermal conductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Resistance Heating (AREA)
- Furnace Details (AREA)
Description
第1図はブリツジマン法の説明図、第2図は本
考案の一実施例を示す構成説明図、第3図は第2
図の動作を説明するための温度分布例図、第4図
および第5図はそれぞれ従来の装置の構成説明図
である。
1…炉心管、2…ヒータ線、3…温度センサ、
4…温度制御装置、5…保護管、6…放熱体、7
…金属線。
Fig. 1 is an explanatory diagram of the Bridgeman method, Fig. 2 is an explanatory diagram of the configuration showing one embodiment of the present invention, and Fig. 3 is an explanatory diagram of the second embodiment of the Bridgeman method.
FIG. 4 and FIG. 5 are illustrations of the configuration of conventional devices, respectively. 1... Furnace core tube, 2... Heater wire, 3... Temperature sensor,
4... Temperature control device, 5... Protection tube, 6... Heat sink, 7
...Metal wire.
Claims (1)
ように構成された加熱炉において、炉心管内に熱
の良導体により円筒状に形成された放熱体を移動
可能に配置したことを特徴とする結晶成長炉装置
。 A crystal growth furnace configured to set a predetermined temperature distribution necessary for crystal growth, characterized in that a heat sink formed in a cylindrical shape made of a good thermal conductor is movably arranged in a furnace core tube. Device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13747584U JPS6151689U (en) | 1984-09-11 | 1984-09-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13747584U JPS6151689U (en) | 1984-09-11 | 1984-09-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6151689U true JPS6151689U (en) | 1986-04-07 |
Family
ID=30695890
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13747584U Pending JPS6151689U (en) | 1984-09-11 | 1984-09-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6151689U (en) |
-
1984
- 1984-09-11 JP JP13747584U patent/JPS6151689U/ja active Pending
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