JPS6226028U - - Google Patents

Info

Publication number
JPS6226028U
JPS6226028U JP11622185U JP11622185U JPS6226028U JP S6226028 U JPS6226028 U JP S6226028U JP 11622185 U JP11622185 U JP 11622185U JP 11622185 U JP11622185 U JP 11622185U JP S6226028 U JPS6226028 U JP S6226028U
Authority
JP
Japan
Prior art keywords
control device
forced cooling
cooling control
heater chamber
vertical furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11622185U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11622185U priority Critical patent/JPS6226028U/ja
Publication of JPS6226028U publication Critical patent/JPS6226028U/ja
Pending legal-status Critical Current

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  • Furnace Details (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本考案の実施例を示す縦断面図であ
る。 1…縦型炉、2…炉体、3…ヒータ室、4…ヒ
ータ、5…石英管、6…放熱口、7…強制冷却制
御装置、8…断熱キヤツプ、9…温度制御装置、
10…熱電対。
FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Vertical furnace, 2...Furnace body, 3...Heater chamber, 4...Heater, 5...Quartz tube, 6...Radiation port, 7...Forced cooling control device, 8...Insulating cap, 9...Temperature control device,
10...Thermocouple.

Claims (1)

【実用新案登録請求の範囲】 1 炉体のヒータ室に縦長に石英管を設け、ヒー
タ室上部の放熱口に強制冷却制御装置の断熱キヤ
ツプを設け、強制冷却制御装置に、ヒータ室の温
度を調整する温度制御装置を連結したことを特徴
とする縦型炉用強制冷却制御装置。 2 ヒータ室は熱電対を有することを特徴とする
実用新案登録請求の範囲第1項記載の縦型炉用強
制冷却制御装置。 3 熱電対は温度制御装置と接続していることを
特徴とする実用新案登録請求の範囲第2項記載の
縦型炉用強制冷却制御装置。
[Scope of Claim for Utility Model Registration] 1. A vertically elongated quartz tube is provided in the heater chamber of the furnace body, an insulating cap for a forced cooling control device is provided at the heat dissipation port in the upper part of the heater chamber, and the temperature of the heater chamber is controlled by the forced cooling control device. A forced cooling control device for a vertical furnace, characterized by connecting a temperature control device for adjustment. 2. The forced cooling control device for a vertical furnace according to claim 1, wherein the heater chamber has a thermocouple. 3. A forced cooling control device for a vertical furnace according to claim 2, wherein the thermocouple is connected to a temperature control device.
JP11622185U 1985-07-29 1985-07-29 Pending JPS6226028U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11622185U JPS6226028U (en) 1985-07-29 1985-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11622185U JPS6226028U (en) 1985-07-29 1985-07-29

Publications (1)

Publication Number Publication Date
JPS6226028U true JPS6226028U (en) 1987-02-17

Family

ID=31000608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11622185U Pending JPS6226028U (en) 1985-07-29 1985-07-29

Country Status (1)

Country Link
JP (1) JPS6226028U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02146426U (en) * 1989-05-17 1990-12-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02146426U (en) * 1989-05-17 1990-12-12

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