JPS6226028U - - Google Patents
Info
- Publication number
- JPS6226028U JPS6226028U JP11622185U JP11622185U JPS6226028U JP S6226028 U JPS6226028 U JP S6226028U JP 11622185 U JP11622185 U JP 11622185U JP 11622185 U JP11622185 U JP 11622185U JP S6226028 U JPS6226028 U JP S6226028U
- Authority
- JP
- Japan
- Prior art keywords
- control device
- forced cooling
- cooling control
- heater chamber
- vertical furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 230000017525 heat dissipation Effects 0.000 claims 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Furnace Details (AREA)
Description
第1図は、本考案の実施例を示す縦断面図であ
る。
1…縦型炉、2…炉体、3…ヒータ室、4…ヒ
ータ、5…石英管、6…放熱口、7…強制冷却制
御装置、8…断熱キヤツプ、9…温度制御装置、
10…熱電対。
FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Vertical furnace, 2...Furnace body, 3...Heater chamber, 4...Heater, 5...Quartz tube, 6...Radiation port, 7...Forced cooling control device, 8...Insulating cap, 9...Temperature control device,
10...Thermocouple.
Claims (1)
タ室上部の放熱口に強制冷却制御装置の断熱キヤ
ツプを設け、強制冷却制御装置に、ヒータ室の温
度を調整する温度制御装置を連結したことを特徴
とする縦型炉用強制冷却制御装置。 2 ヒータ室は熱電対を有することを特徴とする
実用新案登録請求の範囲第1項記載の縦型炉用強
制冷却制御装置。 3 熱電対は温度制御装置と接続していることを
特徴とする実用新案登録請求の範囲第2項記載の
縦型炉用強制冷却制御装置。[Scope of Claim for Utility Model Registration] 1. A vertically elongated quartz tube is provided in the heater chamber of the furnace body, an insulating cap for a forced cooling control device is provided at the heat dissipation port in the upper part of the heater chamber, and the temperature of the heater chamber is controlled by the forced cooling control device. A forced cooling control device for a vertical furnace, characterized by connecting a temperature control device for adjustment. 2. The forced cooling control device for a vertical furnace according to claim 1, wherein the heater chamber has a thermocouple. 3. A forced cooling control device for a vertical furnace according to claim 2, wherein the thermocouple is connected to a temperature control device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11622185U JPS6226028U (en) | 1985-07-29 | 1985-07-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11622185U JPS6226028U (en) | 1985-07-29 | 1985-07-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6226028U true JPS6226028U (en) | 1987-02-17 |
Family
ID=31000608
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11622185U Pending JPS6226028U (en) | 1985-07-29 | 1985-07-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6226028U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02146426U (en) * | 1989-05-17 | 1990-12-12 |
-
1985
- 1985-07-29 JP JP11622185U patent/JPS6226028U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02146426U (en) * | 1989-05-17 | 1990-12-12 |
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