JPS61144638U - - Google Patents
Info
- Publication number
- JPS61144638U JPS61144638U JP2732885U JP2732885U JPS61144638U JP S61144638 U JPS61144638 U JP S61144638U JP 2732885 U JP2732885 U JP 2732885U JP 2732885 U JP2732885 U JP 2732885U JP S61144638 U JPS61144638 U JP S61144638U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- quartz tubes
- heater
- end side
- heating furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
Description
第１図は本考案の実施例を示す縦断端面図、第
２図は本考案の他の実施例を示す横断面図、第３
図は従来の縦形半導体熱処理炉の一例を示す縦断
端面図である。
１……炉体、２……ヒータ、３……石英管、Ｆ
……加熱炉、６……ボート支持台、７……ボート
、Ｗ……半導体ウエハ。
Fig. 1 is a vertical cross-sectional end view showing an embodiment of the present invention, Fig. 2 is a cross-sectional view showing another embodiment of the present invention, and Fig. 3 is a cross-sectional view showing another embodiment of the present invention.
The figure is a longitudinal cross-sectional end view showing an example of a conventional vertical semiconductor heat treatment furnace. 1... Furnace body, 2... Heater, 3... Quartz tube, F
...Heating furnace, 6...Boat support stand, 7...Boat, W...Semiconductor wafer.
Claims (1)
た縦形の加熱炉と、少なくとも下端側が開放され
ていて前記加熱炉のヒータ内側に縦向きに並設さ
れた複数個の石英管と、それぞれが熱処理すべき
半導体を載置するボートを支持し駆動機構により
駆動されて前記複数個の石英管それぞれの下方か
ら該石英管内に前記ボートを出し入れする複数個
のボート支持台とを具備してなる縦形半導体熱処
理装置。 A vertical heating furnace equipped with a heater on the inner wall of a furnace body with an open lower end side, and a plurality of quartz tubes each having an open lower end side and arranged vertically inside the heater of the heating furnace. A vertical boat support stand that supports a boat on which semiconductors to be heat treated are placed and is driven by a drive mechanism to move the boat in and out of the quartz tubes from below each of the quartz tubes. Semiconductor heat treatment equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2732885U JPS61144638U (en) | 1985-02-28 | 1985-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2732885U JPS61144638U (en) | 1985-02-28 | 1985-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61144638U true JPS61144638U (en) | 1986-09-06 |
Family
ID=30524179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2732885U Pending JPS61144638U (en) | 1985-02-28 | 1985-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61144638U (en) |
-
1985
- 1985-02-28 JP JP2732885U patent/JPS61144638U/ja active Pending