JPS63153522U - - Google Patents
Info
- Publication number
- JPS63153522U JPS63153522U JP4604687U JP4604687U JPS63153522U JP S63153522 U JPS63153522 U JP S63153522U JP 4604687 U JP4604687 U JP 4604687U JP 4604687 U JP4604687 U JP 4604687U JP S63153522 U JPS63153522 U JP S63153522U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- heat treatment
- core tube
- furnace
- furnace body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Muffle Furnaces And Rotary Kilns (AREA)
Description
第１図はこの考案の一実施例の熱処理装置の断
面図、第２図はボートの炉芯管への挿入時の状態
を示す断面図、第３図は熱処理中の断面図、第４
図はボートを炉芯管外へ引き出し時の状態を示す
断面図である。第５図は従来の熱処理装置の断面
図である。
１……炉芯管、３……ヒータ、４……炉体、５
……ボート、６……半導体ウエーハ、７……ボー
トローダ、９……熱遮蔽板。
Fig. 1 is a sectional view of a heat treatment apparatus according to an embodiment of this invention, Fig. 2 is a sectional view showing the state when the boat is inserted into the furnace core tube, Fig. 3 is a sectional view during heat treatment, and Fig. 4
The figure is a sectional view showing the state when the boat is pulled out of the furnace core tube. FIG. 5 is a sectional view of a conventional heat treatment apparatus. 1... Furnace core tube, 3... Heater, 4... Furnace body, 5
... Boat, 6 ... Semiconductor wafer, 7 ... Boat loader, 9 ... Heat shield plate.
Claims (1)
導体ウエーハが整列支持されて炉芯管内に挿入さ
れるボートとを備えてなる熱処理装置において、 前記ボートの先端に熱遮蔽板を配設したことを
特徴とする熱処理装置。[Claims for Utility Model Registration] A heat treatment apparatus comprising a furnace body, a furnace core tube inserted into the furnace body, and a boat in which a number of semiconductor wafers are aligned and supported and inserted into the furnace core tube, A heat treatment device characterized by a heat shield plate placed at the tip of the boat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4604687U JPS63153522U (en) | 1987-03-27 | 1987-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4604687U JPS63153522U (en) | 1987-03-27 | 1987-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63153522U true JPS63153522U (en) | 1988-10-07 |
Family
ID=30865345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4604687U Pending JPS63153522U (en) | 1987-03-27 | 1987-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63153522U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015140870A1 (en) * | 2014-03-17 | 2015-09-24 | 三菱電機株式会社 | Refrigeration cycle apparatus |
-
1987
- 1987-03-27 JP JP4604687U patent/JPS63153522U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015140870A1 (en) * | 2014-03-17 | 2015-09-24 | 三菱電機株式会社 | Refrigeration cycle apparatus |
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