JPS63112332U - - Google Patents
Info
- Publication number
- JPS63112332U JPS63112332U JP373787U JP373787U JPS63112332U JP S63112332 U JPS63112332 U JP S63112332U JP 373787 U JP373787 U JP 373787U JP 373787 U JP373787 U JP 373787U JP S63112332 U JPS63112332 U JP S63112332U
- Authority
- JP
- Japan
- Prior art keywords
- optical waveguide
- core tube
- furnace core
- heating element
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Description
第１図は本考案に係る熱処理炉の要部を示す断
面図、第２図は同じく熱処理炉の全体を示す断面
図、第３図は従来の熱処理炉の全体を示す断面図
である。
２……半導体ウエハ、４……発熱体、５……均
熱管、１１……炉芯管、１１ａ……管壁、１２…
…ダミーウエハ、１３……貫通孔、１４ａ……第
１の光導波管、１４ｂ……第２の光導波管、１５
……光電変換素子。
FIG. 1 is a sectional view showing the main parts of a heat treatment furnace according to the present invention, FIG. 2 is a sectional view showing the entire heat treatment furnace, and FIG. 3 is a sectional view showing the entire conventional heat treatment furnace. 2... Semiconductor wafer, 4... Heating element, 5... Soaking tube, 11... Furnace core tube, 11a... Tube wall, 12...
...Dummy wafer, 13...Through hole, 14a...First optical waveguide, 14b...Second optical waveguide, 15
...Photoelectric conversion element.
Claims (1)
の炉芯管の周囲に設けられ前記被測定物を加熱す
る発熱体と、この発熱体に挿通されかつ光電変換
素子に接続された第１の光導波管と、この第１の
光導波管に着脱自在に取り付けられかつ前記炉芯
管の管壁に固定された第２の光導波管とを備え、
この第２の光導波管は前記被測定物から放射され
るエネルギーを受光可能な位置に位置付けられて
いることを特徴とする熱処理炉。 A furnace core tube capable of accommodating an object to be measured inside the furnace core tube, a heating element provided around the furnace core tube to heat the object to be measured, and a heating element inserted through the heating element and connected to a photoelectric conversion element. 1 optical waveguide, and a second optical waveguide detachably attached to the first optical waveguide and fixed to the tube wall of the furnace core tube,
A heat treatment furnace characterized in that the second optical waveguide is positioned at a position where it can receive energy radiated from the object to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP373787U JPS63112332U (en) | 1987-01-14 | 1987-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP373787U JPS63112332U (en) | 1987-01-14 | 1987-01-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63112332U true JPS63112332U (en) | 1988-07-19 |
Family
ID=30783770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP373787U Pending JPS63112332U (en) | 1987-01-14 | 1987-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63112332U (en) |
-
1987
- 1987-01-14 JP JP373787U patent/JPS63112332U/ja active Pending