JPH01104719U - - Google Patents

Info

Publication number
JPH01104719U
JPH01104719U JP20014087U JP20014087U JPH01104719U JP H01104719 U JPH01104719 U JP H01104719U JP 20014087 U JP20014087 U JP 20014087U JP 20014087 U JP20014087 U JP 20014087U JP H01104719 U JPH01104719 U JP H01104719U
Authority
JP
Japan
Prior art keywords
core tube
furnace core
holder
closes
open end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20014087U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20014087U priority Critical patent/JPH01104719U/ja
Publication of JPH01104719U publication Critical patent/JPH01104719U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Muffle Furnaces And Rotary Kilns (AREA)
  • Furnace Details (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１，２図は本考案に係る熱処理装置の第１実
施例を示す図であり、第１図はその構成を示す図
、第２図はその試料交換時の作用を説明するため
の図である。第３，４図は本考案に係る熱処理装
置の第２実施例を示す図であり、第３図はその構
成を示す図、第４図はその試料交換時の作用を説
明するための図である。第５図は従来の熱処理装
置の構成を示す図である。 １１……炉芯管、１２……ヒータ（熱源）、１
３……試料、１４……ホルダー、１８……プレー
ト部材。 Figures 1 and 2 are diagrams showing the first embodiment of the heat treatment apparatus according to the present invention, Figure 1 is a diagram showing its configuration, and Figure 2 is a diagram for explaining the operation during sample exchange. be. 3 and 4 are diagrams showing a second embodiment of the heat treatment apparatus according to the present invention, FIG. 3 is a diagram showing its configuration, and FIG. 4 is a diagram for explaining the operation during sample exchange. be. FIG. 5 is a diagram showing the configuration of a conventional heat treatment apparatus. 11... Furnace core tube, 12... Heater (heat source), 1
3...Sample, 14...Holder, 18...Plate member.

Claims (1)

【実用新案登録請求の範囲】 熱源１２によつて内部が加熱される炉芯管１１
と、 試料１３を乗せて該炉芯管内部の定位置に挿入
され、また、炉芯管外部に引き出されるホルダー
１４と、 該ホルダー１４の挿入および引き出しに追随す
るとともに、ホルダー１４の定位置到達に伴つて
炉芯管１１の開口端１１ａを閉鎖するキヤツプ１
６と、 を具備する熱処理装置において、 前記ホルダー１４の挿入および引き出しに追随
するとともに、少なくともホルダー１４が引き出
されたとき、炉芯管１１の開口端面の大部分を閉
鎖するプレート部材１８を備えたことを特徴とす
る熱処理装置。[Claims for Utility Model Registration] Furnace core tube 11 whose inside is heated by heat source 12
A holder 14 is inserted into a fixed position inside the furnace core tube with the sample 13 placed thereon, and is also pulled out to the outside of the furnace core tube. The cap 1 closes the open end 11a of the furnace core tube 11 in accordance with the
6, and a plate member 18 that follows the insertion and withdrawal of the holder 14 and closes most of the open end surface of the furnace core tube 11 at least when the holder 14 is withdrawn. A heat treatment device characterized by:
JP20014087U 1987-12-29 1987-12-29 Pending JPH01104719U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20014087U JPH01104719U (en) 1987-12-29 1987-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20014087U JPH01104719U (en) 1987-12-29 1987-12-29

Publications (1)

Publication Number Publication Date
JPH01104719U true JPH01104719U (en) 1989-07-14

Family

ID=31490565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20014087U Pending JPH01104719U (en) 1987-12-29 1987-12-29

Country Status (1)

Country Link
JP (1) JPH01104719U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112329A (en) * 1985-11-11 1987-05-23 Deisuko Saiyaa Japan:Kk Antioxidation of led-in semiconductor substrate
JPS63257220A (en) * 1987-04-15 1988-10-25 Hitachi Ltd Vertical treatment apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112329A (en) * 1985-11-11 1987-05-23 Deisuko Saiyaa Japan:Kk Antioxidation of led-in semiconductor substrate
JPS63257220A (en) * 1987-04-15 1988-10-25 Hitachi Ltd Vertical treatment apparatus

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