JPH0252439U - - Google Patents
Info
- Publication number
- JPH0252439U JPH0252439U JP13059388U JP13059388U JPH0252439U JP H0252439 U JPH0252439 U JP H0252439U JP 13059388 U JP13059388 U JP 13059388U JP 13059388 U JP13059388 U JP 13059388U JP H0252439 U JPH0252439 U JP H0252439U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace
- heat treatment
- treatment furnace
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 9
- 238000009792 diffusion process Methods 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Description
第１図はこの考案の一実施例による熱処理炉用
炉心管を示す正面図、第２図は第１図における熱
処理炉用炉心管の側面図、第３図はこの考案の一
実施例による熱処理炉用炉心管とヒーターの側面
図、第４図はこの考案の一実施例による熱処理炉
用炉心管の炉体へのセツト状態を示す部分側面図
、第５図は従来の熱処理炉用炉心管を示す正面図
、第６図は第５図における熱処理炉用炉心管の側
面図、第７図は従来の熱処理炉用炉心管とヒータ
ーの側面図、第８図は従来の熱処理炉用炉心管の
炉体へのセツト状態を示す部分側面図である。
図において、１は炉心管、３は炉心管入口、４
は滑らかな曲面を持つ凸状部、５はソフトブロツ
ク、６はテーパである。なお、図中、同一符号は
同一、又は相当部分を示す。
FIG. 1 is a front view showing a core tube for a heat treatment furnace according to an embodiment of this invention, FIG. 2 is a side view of the core tube for a heat treatment furnace in FIG. 1, and FIG. 3 is a heat treatment according to an embodiment of this invention. A side view of a furnace core tube and a heater, FIG. 4 is a partial side view showing a state in which a heat treatment furnace core tube according to an embodiment of this invention is set in a furnace body, and FIG. 5 is a conventional heat treatment furnace core tube. FIG. 6 is a side view of the heat treatment furnace core tube in FIG. 5, FIG. 7 is a side view of the conventional heat treatment furnace core tube and heater, and FIG. 8 is the conventional heat treatment furnace core tube. FIG. 3 is a partial side view showing the state in which the furnace body is set. In the figure, 1 is the core tube, 3 is the core tube inlet, and 4 is the core tube.
5 is a convex portion with a smooth curved surface, 5 is a soft block, and 6 is a taper. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
て、炉心管入口外側下部に滑らかな曲面を持つ凸
状部を有することを特徴とする熱処理炉用炉心管
。 A furnace core tube for a heat treatment furnace, which is used in an oxidation and diffusion furnace for heat-treating semiconductor substrates, and is characterized by having a convex portion with a smooth curved surface at the lower part of the outer side of the entrance of the core tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13059388U JPH0252439U (en) | 1988-10-05 | 1988-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13059388U JPH0252439U (en) | 1988-10-05 | 1988-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252439U true JPH0252439U (en) | 1990-04-16 |
Family
ID=31385903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13059388U Pending JPH0252439U (en) | 1988-10-05 | 1988-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252439U (en) |
-
1988
- 1988-10-05 JP JP13059388U patent/JPH0252439U/ja active Pending