JPH0313732U - - Google Patents
Info
- Publication number
- JPH0313732U JPH0313732U JP7526789U JP7526789U JPH0313732U JP H0313732 U JPH0313732 U JP H0313732U JP 7526789 U JP7526789 U JP 7526789U JP 7526789 U JP7526789 U JP 7526789U JP H0313732 U JPH0313732 U JP H0313732U
- Authority
- JP
- Japan
- Prior art keywords
- heat insulating
- insulating ring
- furnace tube
- diffusion furnace
- end hat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 4
Landscapes
- Muffle Furnaces And Rotary Kilns (AREA)
Description
第１図はこの考案の一実施例である拡散炉チユ
ーブの断熱位置決め装置の側断面図、第２図は第
１図の正面図、第３図は従来の拡散炉チユーブの
断熱位置決の装置の側断面図、第４図は第３図の
正面図である。
図において、１は炉体、２はチユーブ、３はエ
ンドハツト、４は断熱リング、６は止め金具を示
す。なお、図中、同一符号は同一、または相当部
分を示す。
Fig. 1 is a side sectional view of an adiabatic positioning device for a diffusion furnace tube which is an embodiment of this invention, Fig. 2 is a front view of Fig. 1, and Fig. 3 is a conventional adiabatic positioning device for a diffusion furnace tube. FIG. 4 is a front view of FIG. 3. In the figure, 1 is a furnace body, 2 is a tube, 3 is an end hat, 4 is a heat insulating ring, and 6 is a stopper. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
ングと、この断熱リングを固定するエンドハツト
から構成され、前記断熱リングと前記エンドハツ
トを２分割とした事を特徴とする拡散炉チユーブ
の断熱位置決め装置。 A heat insulating positioning device for a diffusion furnace tube comprising a heat insulating ring for floating the diffusion furnace tube in a furnace body and an end hat for fixing the heat insulating ring, and characterized in that the heat insulating ring and the end hat are divided into two parts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7526789U JPH0313732U (en) | 1989-06-27 | 1989-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7526789U JPH0313732U (en) | 1989-06-27 | 1989-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0313732U true JPH0313732U (en) | 1991-02-12 |
Family
ID=31615698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7526789U Pending JPH0313732U (en) | 1989-06-27 | 1989-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0313732U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009218348A (en) * | 2008-03-10 | 2009-09-24 | Koyo Thermo System Kk | Vertical furnace equipment |
| JP2009253179A (en) * | 2008-04-10 | 2009-10-29 | Koyo Thermo System Kk | Horizontal furnace |
-
1989
- 1989-06-27 JP JP7526789U patent/JPH0313732U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009218348A (en) * | 2008-03-10 | 2009-09-24 | Koyo Thermo System Kk | Vertical furnace equipment |
| JP2009253179A (en) * | 2008-04-10 | 2009-10-29 | Koyo Thermo System Kk | Horizontal furnace |