JPS62190337U - - Google Patents
Info
- Publication number
- JPS62190337U JPS62190337U JP7823186U JP7823186U JPS62190337U JP S62190337 U JPS62190337 U JP S62190337U JP 7823186 U JP7823186 U JP 7823186U JP 7823186 U JP7823186 U JP 7823186U JP S62190337 U JPS62190337 U JP S62190337U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- core tube
- furnace core
- rails
- semiconductor heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 10
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本考案に係る半導体熱処理用炉芯管の
一部破断斜視図、第２図は本考案に係る半導体熱
処理用炉芯管の使用状態を示す断面図、第３図は
従来の石英チユーブを有する半導体製造装置の構
成図、第４図は従来の半導体熱処理用炉芯管の使
用状態を示す断面図、第５図は従来装置の問題点
の説明図である。
３……ウエハ、５……ボート、１１……石英チ
ユーブ、１２……石英製角棒、１２―１……外側
面、１３……軌条。
FIG. 1 is a partially cutaway perspective view of the semiconductor heat treatment furnace core tube according to the present invention, FIG. 2 is a sectional view showing the state of use of the semiconductor heat treatment furnace core tube according to the present invention, and FIG. 3 is a conventional quartz core tube. FIG. 4 is a sectional view showing how a conventional furnace core tube for semiconductor heat treatment is used, and FIG. 5 is an explanatory diagram of problems with the conventional apparatus. 3... Wafer, 5... Boat, 11... Quartz tube, 12... Quartz square bar, 12-1... Outer surface, 13... Rail.
Claims (1)
体熱処理用炉芯管において、 該炉芯管内に一対の軌条を敷設し、該軌条で熱
処理ポートを案内するようにしたことを特徴とす
る半導体熱処理用炉芯管。 (2) 前記一対の軌条は一組敷設されるようにし
たことを特徴とする実用新案登録請求の範囲第１
項記載の半導体熱処理用炉芯管。 (3) 前記一対の軌条は複数組敷設されるように
したことを特徴とする実用新案登録請求の範囲第
１項記載の半導体熱処理用炉芯管。 (4) 前記軌条は石英製の凸状体であることを特
徴とする実用新案登録請求の範囲第１項記載の半
導体熱処理用炉芯管。 (5) 前記軌条の間隔は前記熱処理ボートの脚部
の間隔に対応するように配設してなる実用新案登
録請求の範囲第１項記載の半導体熱処理用炉芯管
。[Scope of Claim for Utility Model Registration] (1) In a furnace core tube for semiconductor heat treatment used in the manufacture of semiconductor integrated circuits, a pair of rails are laid inside the furnace core tube, and the heat treatment port is guided by the rails. A furnace core tube for semiconductor heat treatment characterized by the following. (2) Claim 1 of the utility model registration, characterized in that the pair of rails are laid as one set.
A furnace core tube for semiconductor heat treatment as described in . (3) The furnace core tube for semiconductor heat treatment according to claim 1, wherein a plurality of sets of the pair of rails are installed. (4) The furnace core tube for semiconductor heat treatment according to claim 1, wherein the rail is a convex body made of quartz. (5) The furnace core tube for semiconductor heat treatment according to claim 1, wherein the distance between the rails corresponds to the distance between the legs of the heat treatment boat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7823186U JPS62190337U (en) | 1986-05-26 | 1986-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7823186U JPS62190337U (en) | 1986-05-26 | 1986-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62190337U true JPS62190337U (en) | 1987-12-03 |
Family
ID=30926982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7823186U Pending JPS62190337U (en) | 1986-05-26 | 1986-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62190337U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0357931U (en) * | 1989-10-11 | 1991-06-05 |
-
1986
- 1986-05-26 JP JP7823186U patent/JPS62190337U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0357931U (en) * | 1989-10-11 | 1991-06-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS62190337U (en) | ||
| JPS6188233U (en) | ||
| JPS62138438U (en) | ||
| JPS63186286U (en) | ||
| JPS6331528U (en) | ||
| JPS6357734U (en) | ||
| JPH0172192U (en) | ||
| JPS6327786U (en) | ||
| JPH0211485U (en) | ||
| JPS60149130U (en) | Semiconductor heat treatment furnace | |
| JPS63111171U (en) | ||
| JPH0419569U (en) | ||
| JPS6454331U (en) | ||
| JPS6030921U (en) | Hot water floor for bathhouse | |
| JPS6185822U (en) | ||
| JPS6457634U (en) | ||
| JPS5826382U (en) | Baby bed sheets and bath towels with markings | |
| JPH01161326U (en) | ||
| JPS63108631U (en) | ||
| JPS6358626U (en) | ||
| JPS6287338U (en) | ||
| JPH0190458U (en) | ||
| JPS63127121U (en) | ||
| JPS6227660U (en) | ||
| JPS63103390U (en) |