JPS6357734U - - Google Patents
Info
- Publication number
- JPS6357734U JPS6357734U JP1986151468U JP15146886U JPS6357734U JP S6357734 U JPS6357734 U JP S6357734U JP 1986151468 U JP1986151468 U JP 1986151468U JP 15146886 U JP15146886 U JP 15146886U JP S6357734 U JPS6357734 U JP S6357734U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor manufacturing
- wafer transfer
- operation unit
- transfer area
- area side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012423 maintenance Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Description
第１図は本考案の一実施例である半導体製造装
置を示す平面図、第２図は第１図の制御部の接続
構成を示す構成ブロツク図である。
１……ウエハ搬送用エリア、２……メンテナン
スエリア、３……間仕切り、４……主操作部、６
……装置本体、７……副操作部、８……接続用コ
ネクタ。
FIG. 1 is a plan view showing a semiconductor manufacturing apparatus which is an embodiment of the present invention, and FIG. 2 is a block diagram showing the connection structure of the control section shown in FIG. 1... Wafer transfer area, 2... Maintenance area, 3... Partition, 4... Main operation section, 6
... Device main body, 7 ... Sub-operation section, 8 ... Connection connector.
Claims (1)
テナンスエリアとに間仕切りして設置される半導
体製造装置において、前記ウエハ搬送用エリア側
に設けられた操作部とは別に、前記メンテナンス
エリア側に副操作部を着脱可能に設けたことを特
徴とする半導体製造装置。 In semiconductor manufacturing equipment that is installed in a clean room partitioned into a wafer transfer area and a maintenance area, a sub-operation unit can be attached and detached to the maintenance area side in addition to the operation unit provided on the wafer transfer area side. 1. A semiconductor manufacturing device characterized by being provided with.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986151468U JPS6357734U (en) | 1986-10-03 | 1986-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986151468U JPS6357734U (en) | 1986-10-03 | 1986-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6357734U true JPS6357734U (en) | 1988-04-18 |
Family
ID=31068564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986151468U Pending JPS6357734U (en) | 1986-10-03 | 1986-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6357734U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02239611A (en) * | 1989-03-14 | 1990-09-21 | Fujitsu Ltd | Semiconductor manufacturing equipment |
| JP2012231150A (en) * | 2012-06-13 | 2012-11-22 | Hitachi Ltd | Vacuum processing apparatus and vacuum processing method |
-
1986
- 1986-10-03 JP JP1986151468U patent/JPS6357734U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02239611A (en) * | 1989-03-14 | 1990-09-21 | Fujitsu Ltd | Semiconductor manufacturing equipment |
| JP2012231150A (en) * | 2012-06-13 | 2012-11-22 | Hitachi Ltd | Vacuum processing apparatus and vacuum processing method |