JPH0341927U - - Google Patents
Info
- Publication number
- JPH0341927U JPH0341927U JP10245389U JP10245389U JPH0341927U JP H0341927 U JPH0341927 U JP H0341927U JP 10245389 U JP10245389 U JP 10245389U JP 10245389 U JP10245389 U JP 10245389U JP H0341927 U JPH0341927 U JP H0341927U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- boat
- inner lid
- gas outlet
- protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Muffle Furnaces And Rotary Kilns (AREA)
Description
第１図は本考案の一実施例に係る熱処理装置の
断面図、第２図から第４図は何れも同実施例の熱
処理装置によつて行われる作業を順を追つて説明
する断面図である。第５図は従来の熱処理装置の
断面図である。
１……半導体ウエハ、３……熱処理用ボート、
１１……炉体、２０……炉芯管、２１……ボート
操作棒、２１ａ……突出部、２２……ガス出口、
２３……内蓋、２４……突起。
Fig. 1 is a sectional view of a heat treatment apparatus according to an embodiment of the present invention, and Figs. be. FIG. 5 is a sectional view of a conventional heat treatment apparatus. 1... Semiconductor wafer, 3... Heat treatment boat,
DESCRIPTION OF SYMBOLS 11...Furnace body, 20...Furnace core tube, 21...Boat operation rod, 21a...Protrusion part, 22...Gas outlet,
23...Inner lid, 24...Protrusion.
Claims (1)
ら半導体ウエハを載置した熱処理用ボートをボー
ト操作棒によつて出し入れし、熱処理時に前記熱
処理用ボートとガス出口間を内蓋で仕切る熱処理
装置において、 上記ボート操作棒を内蓋に遊嵌し、ボート操作
棒の熱処理用ボート側に前記内蓋に引つかかる突
出部を形成すると共に、上記炉芯管のガス出口近
傍の内側面に上記内蓋を外方に係止する突起を突
設したことを特徴とする熱処理装置。[Claim for Utility Model Registration] A heat treatment boat carrying semiconductor wafers is moved in and out of the gas outlet of a furnace core tube housed horizontally in the furnace body using a boat operation rod, and during heat treatment, the heat treatment boat and the gas outlet are In a heat treatment apparatus in which a space is partitioned by an inner lid, the boat operating rod is loosely fitted into the inner lid, and a protrusion that catches on the inner lid is formed on the heat treatment boat side of the boat operating rod, and a A heat treatment apparatus characterized in that a protrusion for locking the inner lid outwardly is provided on an inner surface near the gas outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10245389U JPH0341927U (en) | 1989-08-31 | 1989-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10245389U JPH0341927U (en) | 1989-08-31 | 1989-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0341927U true JPH0341927U (en) | 1991-04-22 |
Family
ID=31651349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10245389U Pending JPH0341927U (en) | 1989-08-31 | 1989-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0341927U (en) |
-
1989
- 1989-08-31 JP JP10245389U patent/JPH0341927U/ja active Pending